Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno

Kees Moddemeyer

Pieter Willem Herman De Jager

Henri Johannes Petrus Vink

Frank Leonard Kooi

Rudolf Leopold Van Renesse

An apparatus is described for scanning a circuit structure. The apparatus has a linear sensor () for detecting light intensity as a function of position along the sensor. A transport mechanism () moves a circuit structure (), such as a PCB or a wafer relative to the sensor. The circuit structure is illuminated with an illumination system () that comprises a hollow cylinder () with a mainly diffusively and/or specularly reflecting inner wall surface. The cylinder is arranged in parallel with the sensor and has a first slit () and a second slit () located so that a virtual plane runs through the sensor, the first and second slit to a location for the circuit structure under inspection. The illumination system furthermore comprises a linear light source () in the cylinder or the inner wall of the cylinder. In an embodiment the illumination system comprises a splitting mirror () in the cylinder to reflect light to the circuit structure.

Apparatus and method for inspecting circuit structures

A head mounted display device comprises a display which is imaged on the eye at an adjustable angle of incidence. On the basis of information about a position of the head of the wearer, the angle of incidence is controlled such that, upon movement of the head, the angle of incidence of the image moves along with that of the outside world.

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Leiden, Netherlands

Kees Moddemeyer