Samsung Electronics Co., Ltd.

Kee Won Lee

Sang Don Lee

Suk Ho Yoon

Jong Uk Seo

Keon Hun Lee

Ho Young Lee

Min Ho Kim

A method for fabricating a nitride semiconductor thin film includes preparing a first nitride single crystal layer doped with an n-type impurity. A plurality of etch pits are formed in a surface of the first nitride single crystal layer by applying an etching gas thereto. A second nitride single crystal layer is grown on the first nitride single crystal layer having the etch pits formed therein.

Method for fabricating nitride semiconductor thin film and method for fabricating nitride semiconductor device using the same

A method of fabricating a nitride semiconductor light emitting device is provided. The method includes growing a first group-III-nitride semiconductor layer on a substrate, the first group-III-nitride semiconductor layer having a top surface formed as a group-III-rich surface exhibiting a group-III-polarity and a bottom surface formed as a N-rich surface exhibiting a N-polarity. The method further includes selectively etching a N-polarity region in the top surface of the first group III nitride semiconductor layer, forming a second group III nitride semiconductor layer on the first group III nitride semiconductor layer to fill the etched N-polarity region and forming a light emitting structure including first and second conductivity type nitride semiconductor layers and an active layer on the second group III nitride semiconductor layer.

Method of fabricating nitride semiconductor light emitting device

Growing community of inventors

Suwon-si, South Korea

Kee Won Lee