Leland Stanford Junior University

Ke-Xun Sun

Robert L Byer

Saps Buchman

Brett A Allard

Graham S Allen

Charge transfer is provided to or from an electrically isolated test body by AC modulation of the photoelectric effect. More specifically, a reference body is disposed near the test body without physical contact between the reference and test bodies. Facing surfaces of the reference and test bodies are illuminated by optical radiation having a sufficiently short wavelength that charged particles are emitted from the reference and test bodies. An electrical bias is established between the reference body and the test body. Both the optical radiation and the electrical bias are modulated at the same frequency. A magnitude and direction of a charge transfer rate between the reference and test bodies is set by selecting a phase relation between the optical radiation and the electrical bias.

Charge management of electrically isolated objects via modulated photoelectric charge transfer

An angular magnification effect of diffraction is exploited to provide improved sensing and scanning. This effect is most pronounced for a normal or near-normal incidence angle in combination with a grazing diffraction angle, so such configurations are preferred. Angular sensitivity can be further enhanced because the width of the diffracted beam can be substantially less than the width of the incident beam. Normal incidence configurations with two symmetric diffracted beams are preferred, since rotation and vertical displacement can be readily distinguished. Increased sensitivity to vertical displacement can be provided by incorporating an interferometer into the measurement system. Quad cell detectors can be employed to provide sensitivity to rotation about the grating surface normal. A 2-D grating can be employed to provide sensitivity to angular displacements in two different planes (e.g., pitch and yaw). Combined systems can provide sensitivity to vertical displacement and to all three angular degrees of freedom.

Grating angle magnification enhanced angular sensor and scanner

Measurement of a distance change between a reference surface and a target is provided. A substrate has a first surface facing the target and including a grating. The grating and target combine to form an optical interferometer responsive to changes in distance between the grating and the target. A second surface of the substrate coincides with the reference surface and faces away from the target. Thickness information pertaining to the substrate is combined with results from the optical interferometer to provide a measurement of distance change between reference surface and target. The substrate is preferably a rigid material having picometer level dimensional stability.

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Stanford, CA, United States of America

Ke-Xun Sun