Industrial Technology Research Institute

Apex Biotechnology Corporation

Ke-Shieng Yang

Justin S Clark

Wen-Pin Hsieh

Yeong-Jeong Ou

Jeng-Shie Chung

Jian-Je Jian

Chin-Tang Chuang

Iany-H Liau

TaiKang Shing

A fluid analytical device for separating and analyzing a fluid including a first component and a second component. The specific weight of the first component exceeds that of the second component. A rotating base includes a receiving chamber, a first separation well, a second separation well, a first connection channel, a second connection channel, and a vent channel. The receiving chamber receives the fluid. The first connection channel connects the receiving chamber to the first separation well. The second connection channel connects the first separation well to the second separation well. The vent channel is connected to the receiving chamber. The distance from the first separation well to the receiving chamber exceeds that from the second separation well to the receiving chamber. When the rotating base rotates, the first and second components of the fluid flow into the first and second separation wells by centrifugal force, respectively.

Fluid analytical devices

A micro pressure sensor comprising a glass substrate or a bulk silicon wafer with a rampart protruding from the surface and a plurality of first contacting pads, a thin membrane having a plurality of piezo-resistors, circuit patterns, and a plurality of second contact pads, and conducting lines, wherein the plurality of contact pads are partially exposed to outside. The rampart on the substrate has a cavity formed on the center of the top surface of the rampart. The top surface of the rampart is tightly bonded to the surface of the thin membrane. The piezo-resistors are sealed in the cavity. Preferably, the micro sensor further comprises a plurality of thermo sensors, and a plurality of temperature-controlling elements all enclosed inside the cavity, and additional protective layers formed on the exposure regions of all contact pads.

Isolated micro pressure sensor and method for making the same

Growing community of inventors

Taipei, Taiwan

Ke-Shieng Yang