Fujimi Incorporated

Tokyo Electron Limited

Kazuyuki Tsuzuki

Hiroyuki Ibe

Kazuto Sato

Nobuyuki Nagayama

Junya Kitamura

Hiroaki Mizuno

Takaya Masuda

Fumi Shinoda

Provided is a thermal spraying material capable of forming a thermally sprayed coating film having improved plasma erosion resistance. The invention disclosed here provides a thermal spraying material. This thermal spraying material comprises composite particles in which a plurality of yttrium fluoride microparticles are integrated. In addition, the compressive strength of the composite particles is 5 MPa or more.

Thermal spraying matertal

This invention provides a thermal spray slurry capable of forming a favorable thermal spray coating. The thermal spray slurry comprises a dispersion medium and thermal spray particles formed of at least one material selected from the group consisting of a ceramic, a cermet and a metal. 800 mL of the thermal spray slurry contains A kg of the thermal spray particles; when 800 mL of the thermal spray slurry in which the thermal spray particles are dispersed is supplied at a flow rate of 35 mL/min to a horizontally-placed tube and collected, the collected slurry contains B kg of the thermal spray particles; and the slurry has a supply efficiency index If of 70% or higher, determined by the next equation If (%)=B/A&#xd7;100.

Thermal spray slurry, thermal spray coating and method for forming thermal spray coating

A thermal spray slurry of the present invention contains ceramic particles having an average particle size of 200 nm or more and 5 &#x3bc;m or less. Precipitates formed when 700 mL of the thermal spray slurry is placed in a 16.5-cm-high cylindrical vessel having a volume of 1 L and is allowed to stand still at room temperature for 1 week are made to disappear by disposing, at a temperature of 20&#xb0; C. or higher and 30&#xb0; C. or lower, the cylindrical vessel so as for the central axis of the cylindrical vessel to be horizontal and by rotating the cylindrical vessel at a rotation speed of 100 rpm for 120 minutes around the central axis of the cylindrical vessel to stir the thermal spray slurry in the cylindrical vessel.

Slurry for thermal spraying, thermal sprayed coating, and method for forming thermal sprayed coating

To provide a slurry for thermal spraying. In the slurry, even when spray particles precipitate, the precipitates easily disappear. The present invention provides a slurry for thermal spraying including spray particles and a dispersion medium. The spray particles have an average circularity in a plan view of 0.85 or less. The spray particles preferably have an average circularity of 0.6 or more. The spray particles may include yttrium fluoride and an yttrium oxyfluoride.

Slurry for thermal spraying, sprayed coating, and method for forming sprayed coating

A thermal spray slurry of the present invention contains ceramic particles in a content of 10% by mass or more and 85% by mass or less, and has a viscosity of 3,000 mPa&#xb7;s or less. The ceramic particles have an average particle size of, for example, 1 nm or more and 5 &#x3bc;m or less. The thermal spray slurry may further contain a dispersant. The thermal spray slurry may further contain a viscosity modifier. The thermal spray slurry may further contain a flocculant.

Slurry for thermal spraying, thermal spray coating, and method for forming thermal spray coating

This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O&#x2014;X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The rare earth element oxyhalide has a halogen to rare earth element molar ratio (X/RE) of 1.1 or greater.

Thermal spray material, thermal spray coating and thermal spray coated article

This invention provides a thermal spray material capable of forming a thermal spray coating excellent in plasma erosion resistance as well as in properties such as porosity and hardness. The thermal spray material comprises a rare earth element oxyhalide (RE-O&#x2014;X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material has an X-ray diffraction pattern that shows a main peak intensity Icorresponding to the rare earth element oxyhalide, a main peak intensity Icorresponding to a rare earth element oxide and a main peak intensity Icorresponding to a rare earth element halide, satisfying a relationship [(I+I)/I]&#x3c;0.02.

This invention provides a thermal spray material capable of forming a thermal spray coating with greater plasma erosion resistance. The thermal spray material comprises at least 77% by mass rare earth element oxyhalide (RE&#x2014;O&#x2014;X) which comprises a rare earth element (RE), oxygen (O) and a halogen atom (X) as its elemental constituents. The thermal spray material is characterized by being essentially free of an oxide of the rare earth element.

Provided is a compact thermal spray powder suitable for forming a ceramic thermal spray coating which is compact and excels in durability. The thermal spray powder disclosed herein includes ceramic particles formed of a ceramic material with a melting point equal to or lower than 2000&#xb0; C. The thermal spray powder is configured such that the peak top of a main peak is in a range of 10 &#x3bc;m or less in a log differential pore volume distribution obtained by a mercury porosimetry, and when the peak top of a second peak is at a fine pore size less than that of the peak top of the main peak, the ratio (H2/H1) of the height H2 of the second peak to the height H1 of the main peak is 0.05 or less.

Thermal spray powder

A thermal spray powder of the present invention contains ceramic particles having an average particle size of 1 &#x3bc;m or more and 20 &#x3bc;m or less. The ceramic particles have a flowability index value FT of 3 or more measured by using a powder rheometer. The flowability index value FF is determined by measuring the maximum principal stress and the uniaxial collapse stress of the ceramic particles at normal temperature and normal humidity when 9 kPa of shear force is applied to the ceramic particles, and by dividing the measured maximum principal stress by the measured uniaxial collapse stress.

Growing community of inventors

Kiyosu, Japan

Kazuyuki Tsuzuki