Hitachi, Ltd.

Hitachi-high-technologies Corporation

Japan Servo Co.,ltd.

Kazuyuki Sugimura

Hiromi Kobayashi

Toshio Ito

Hideo Nishida

Sadashi Tanaka

Masatoshi Watanabe

Fumio Jyoraku

Taro Tanno

Susumu Sato

Taku Iwase

Taiji Tajima

Hiroshi Mukai

Shoji Hayashi

Shigenori Sato

Nobuhiro Kanda

Katsuyasu Inagaki

Takayuki Sudou

Yuichirou Iijima

Ryuji Ikeda

An impeller includes a hub plate and a plurality of blades circumferentially disposed at intervals on one surface side of the hub plate. Each blade has a shape formed by piling up a plurality of blade sections in a blade height-wise direction of each blade in a reference impeller in which the hub plate intersects with the blades and which includes a linear element blade in the blade height-wise direction so as to form a curvilinear element blade. In piling up the blade sections, amounts of tangential lean and sweep to be applied to the blade sections are increased as it goes from an end face of at least one of a hub plate side end and a counter hub plate side end toward a span intermediate part of the blade.

Impeller and turbomachinery including the impeller

In semiconductor surface inspection apparatus, foreign matter that sticks to the wafer can reduce the quality of the wafer. The present invention is directed to improving the internal cleanliness of the apparatus. Specifically, during rotation of a semiconductor wafer, foreign matter suspended in an atmosphere surrounding the wafer is attracted to a central section of the wafer, and that while heading from the central section of the wafer, towards an outer edge thereof, the foreign matter is most likely to stick to the wafer. In conventional techniques, sufficient consideration is not given to such likelihood of foreign matter sticking. This invention supplies a medium from two directions to an inner circumferential section of a substrate. In accordance with the invention, foreign matter that sticks to a wafer can be reduced more significantly than in the conventional techniques.

Inspection apparatus

An axial flow fan of high efficiency and low noise level is provided. The fan includes a motor, an impeller having a plurality of blades around a hub fitted to the motor, and a fan casing having an air inlet on one side and an air outlet on the other, wherein a radial position with a maximum setting angle in a blade section, and a radial position with a contour of a leading edge portion in a fluid flowing direction forming a projecting apex in the flowing direction are located between 60% and 80% of the outside diameter of the impeller.

Axial flow fan

A vacuum cleaner includes a vacuum cleaner body in which a rotating brush, a dust collecting unit and an electric blower unit are integrally attached to a suction opening casing in which a brush chamber is formed. A rodlike handle is connected to the vacuum cleaner body. The rodlike handle is formed by a hollow member, and a plurality of batteries are arranged in series in the hollow member and are covered with a heat contraction tube.

Vacuum cleaner

Growing community of inventors

Hitachinaka, Japan

Kazuyuki Sugimura