Seiko Epson Corporation

Kazuyuki Nakasendo

Jun Watanabe

Takahiro Kameta

Masayuki Oto

A resonator device includes a base including a fixed section and a movable section connected to the fixed section, a resonator element including a first base section, a second base section, and a vibration arm, one end of which is connected to the first base section and the other end of which is connected to the second base section, the first base section being fixed to the fixed section and the second base section being fixed to the movable section, a weight section connected onto the movable section, and a stress relaxing section provided between a connection region of the weight section and the vibration arm.

Resonator device, electronic apparatus, and moving object

A physical quantity detection device includes: a base portion; a movable portion supported by the base portion via a joint and shifting in accordance with a change of a physical quantity; a physical quantity detection element extending over the base portion and the movable portion; a first support member extending from the base portion and having a first fixing portion; and a second support member extending from the base portion and having a second fixing portion. The distance between the first fixing portion and the second fixing portion is shorter than the distance between the root of the first support member at the junction with the base portion and the root of the second support member at the junction with the base portion.

Physical quantity detection device, physical quantity detector, and electronic apparatus

A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.

Method for manufacturing physical quantity detector, and physical quantity detector

An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.

Acceleration sensor

An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.

Growing community of inventors

Shiojiri, Japan

Kazuyuki Nakasendo