Fujikin Inc.

Kazuyuki Morisaki

Nobukazu Ikeda

Kouji Nishino

Masaaki Nagase

Kaoru Hirata

Atsushi Hidaka

Masafumi Kitano

Takatoshi Nakatani

Ryousuke Dohi

Yohei Sawada

Kazuteru Tanaka

Keisuke Ideguchi

Kosuke Sugimoto

Tomokazu Hirota

Toru Hirai

Tooru Hirai

A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

Controller and vaporization supply device

[Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casingfor covering deviceson a main bodyof a fluid controller, the casingis configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first partprovided with a fixing portionfor fixing to the main body, a second partattached to the first part, and a third partattachably and detachably provided at an upper partition higher than a predetermined height position of the casing

Casing for fluid controller and fluid controller provided with same

A diaphragm valve includes a body () having a flow path (), a seat () formed in the flow path (), a metal diaphragm () for opening and closing the flow path (), a pair of clamping parts () and () for claiming peripheral edge portions of the metal diaphragm () to fix the metal diaphragm () to the body (), and an actuator () for abutting the metal diaphragm () to the seat () or separating the metal diaphragm from the seat (), wherein a fluorine resin coating is formed on a seat side surface () of the metal diaphragm () at least in a contact region (B-A) with the seat () in a region (C) surrounded by a clamping region (D-C) between the seat side surface () and one of the pair of clamping portions (), excluding the clamping region (D-C).

Diaphragm valve

The flow controller according to the present invention includes: a control valve; a first flow passage provided on the downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage. The second flow passage is provided in a position that is not on the extension of the first flow passage.

Flow rate control device

In a gas supply device supplying many different gases to a gas use portion through many flow rate controllers, a flow rate controller calibration unit includes a build-up tank with inner volume, an inlet side on-off valve and an outlet side on-off valve Vof the tank, and a gas pressure detector and a gas temperature detector for gas inside the tank, joined in a branched form to a gas supply line, with the valve Vconnected to vacuum. The calibration unit is used to calibrate a flow rate controller based on performing a first measurement of gas temperature and pressure inside the tank, and then building-up gas into the tank, and then performing a second measurement of gas temperature and pressure, and from respective measured values, calculating gas flow rate Q and by comparing a set gas flow rate and calculated gas flow rate Q, performing flow rate calibration.

Calibration method and flow rate measurement method for flow rate controller for gas supply device

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Osaka, Japan

Kazuyuki Morisaki