Adv Antest Corporation

Tohoku University

Kazuyuki Maruo

Takahiro Yamaguchi

Tadahiro Ohmi

Koji Kotani

Tadashi Shibata

Masayoshi Ichikawa

Hitoshi Ujiie

Haruo Kato

Teruaki Fujiwara

There is provided a small-type semiconductor integrated circuit whose circuit area is small and whose wiring length is short. The semiconductor integrated circuit is constructed in a multi-layer structure and is provided with a first semiconductor layer, a first semiconductor layer transistor formed in the first semiconductor layer, a wiring layer which is deposited on the first semiconductor layer and in which metal wires are formed, a second semiconductor layer deposited on the wiring layer and a second semiconductor layer transistor formed in the second semiconductor layer. It is noted that insulation of a gate insulating film of the first semiconductor layer transistor is almost equal with that of a gate insulating film of the second semiconductor layer transistor and the gate insulating film of the second semiconductor layer transistor is formed by means of radical oxidation or radical nitridation.

Semiconductor integrated circuit switch matrix

There is provided a scaling operator for calculating a quotient in a first residue format obtained by dividing an input number in the first residue format by a second modulus in a residue number system for representing numbers by the first residue format of a set of residues obtained with respect to first modulus and residues obtained with respect to second modulus, having a subtracter for outputting inter-moduli values of difference which are values of difference between the residues obtained with respect to the first modulus and the residues obtained with respect to the second modulus and a quotient outputting section for outputting a set of residues of the quotient obtained with respect to the first modulus and residues of the quotient obtained with respect to the second modulus as the quotient based on the inter-moduli values of difference.

Residue number system arithmetic operating system, scaling operator, scaling operation method and program and recording medium of the same

A chemical detecting apparatus includes a substratefor chemicals in gas-to-be-monitored to be adsorbed to, a substrate adsorption rate improving meanswhich enhances the adsorption of the chemical in the gas-to-be-monitored to the substrate, an infrared light sourcewhich applies an infrared light to the substratewith the chemical adsorbed to, and an infrared light detectorwhich detects the infrared light which has made multiple reflections in the substrateand exited the substrate. Thus, chemicals present in environments can be detected at high speed and with high sensitivity.

Method and system for detecting chemical substance

There is provided a high-performance semiconductor integrated circuit whose circuit area is small and whose wiring length is short. The semiconductor integrated circuit is constructed in a multi-layer structure and is provided with a switch block for switching connections among a plurality of signal lines by means of a plurality of transistors formed respectively in a plurality of semiconductor layers and a plurality of logic blocks formed in each of the plurality of semiconductor layers and connected to each of the plurality of signal lines. The first switch block is a programmable switch block capable of changing the connection topology among the plurality of signal lines.

Semiconductor integrated circuit

A sum of product circuit ( ) which adds up two input voltages, each of which is multiplied by the prescribed coefficients. The sum of product circuit ( ) has a &ngr; MOS transistor ( ), a first and a second capacitance (C , C ), and an output terminal ( ). The &ngr; MOS transistor ( ) includes a drain ( ), source ( ), and a floating gate ( ). The first and a second capacitance (C , C ) connects each of two input voltages to the floating gate ( ) by capacity coupling. The output terminal ( ) outputs a voltage realized between a resister element (R ) and the &ngr; MOS transistor ( ). A constant voltage is applied between the drain ( ) and the source ( ) through the resister element (R ).

Sum of product circuit and inclination detecting apparatus

An image processing apparatus for detecting the inclination of an object is provided. This image processing apparatus has a read means which reads the object and outputs image data, an amount of change calculation means which calculates the sum of the amounts of change of the image data of the object in at least one direction, and an inclination calculation means which calculates the inclination of the object based on the sum calculated by the amount of change calculation means.

Image processing apparatus and method for image processing

There is provided a failure analyzing apparatus and a failure analyzing method which are capable of automatically finding a failure address and the number of failures from a fail bit map obtained from the test result of an IC memory. The fail bit map is two-dimensional Wavelet-transformed, and the X directional high-pass and the Y directional low-pass information (the longitudinal component) X (i, j) of the two-dimensional Wavelet-transformed result is added up for each i in the Y direction to create a histogram. A failure address X is found from an address i having an added value other than zero, and the number of failures is found from the absolute value of the added value. In addition, the fail bit map is scanned in the Y direction for each of the failure addresses to output a Y address at which the map changes from a pass to a failure and a Y address at which the map changes from a failure to a pass as well as the number of failures between those two Y addresses.

Failure analyzing method and apparatus using two-dimensional wavelet transforms

Image data is edge-processed and then digitized. This image data is Hough-transformed to generate a parameter plane in which multiple Hough-curves are plotted in a parameter space, from which coordinates with multiple intersected Hough-curves are extracted and grouped. For each group, representative coordinates are selected to estimate slopes of linear components in the image data. In this way, the linear components can be recognized from the image data to estimate the slope, thereby making it possible to modify slopes of linear components in image data of a semiconductor wafer taken at an arbitrary angle or the like.

Method for detecting slope of image data utilizing hough-transform

There is provided an image information processing apparatus capable of detecting a defect on a device even from an unclear SEM image thereof, and without using a golden device or a CAD data, at high speed. A two dimensional Wavelet transform is applied to an input digital image data. A threshold value process (a binarization process) is then applied to longitudinal line detection components and lateral line detection components obtained by the two dimensional Wavelet transform to create respective binarization images of the longitudinal line detection components and the lateral line detection components. A Hough transform is applied to each binarization image to obtain a position and a size of an object to be detected. If a threshold value process is applied to an image in a parameter space obtained by the Hough transform, a detection of particular figure information becomes easy. With respect to the binarization image, active pixels are grouped such that the same label is given to adjacent active pixels. A position and a size of an object to be detected can automatically be specified by finding center of gravity coordinates of each of the labels.

Image information processing apparatus

An image information recognition system is provided which quantifies an angle of rotation and/or magnification of a wiring pattern in an image to facilitate a subsequent image retrieval. The system comprises edge detecting means which detects an edge component from input digital image data, a first binarization processor means for applying a threshold operation to the image obtained to provide binarization image data comprising active and inactive picture elements, Hough transformation means for applying a Hough transformation to the binarization image, second binarization processor means for applying a threshold operation to the Hough transformed image to provide binarization image data comprising active and inactive picture elements, labeling processor means for collecting adjacent images in the binarization image into a group and labeling the group, representative point calculation means for determining the coordinates a of representative point for each group labeled, and linear component estimation means for determining a linear equation for a rectilinear portion of the edge component in the original image from coordinate information of respective representative points determined.

System and method for recognition of image information

An input digital image data is subject to a Wavelet transform on a screen on which the image is formed, an image energy quantity for a combined area of X-axis high pass information and Y-axis high pass information contained in the image data which results from the Wavelet transform is calculated, and it is determined if an object being examined is acceptable or faulty depending on whether the image energy quantity is below or above a given value.

Method of image processing

A frequency standard generator includes a voltage controlled crystal oscillator (VCXO) for generating high stability output signal, a radio wave receiver to receive a radio wave which includes a high accuracy reference time signal, a time interval measuring circuit which measures a phase difference between the reference time signal and the output signal of the VCXO; a frequency control processor which determines control data based on the phase difference data to phase lock the output signal of the VCXO to the reference time signal, a frequency deviation data generator for compiling the phase difference data to obtain frequency deviation trend data of the VCXO, and a compensation data generator for generating compensation data based on the frequency deviation trend data to compensate frequency changes in said VCXO when the reference time signal is unavailable.

Standard frequency and timing generator and generation method thereof

Image processor having object recognition ability

A particle-like point in an image is detected to detect a defect by directly processing an image of an object to be inspected. The image is first binarized, and the binarized image is scanned along an X-axis or a Y-axis, and a particle-like point in the image is approximated by a rectangular area. Information representative of the coordinates of the center of the rectangular area and the size of the rectangular area is outputted as information of the detected particle-like point.

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Tokyo, Japan

Kazuyuki Maruo