Toyota Jidosha Kabushiki Kaisha

Nagoya University

Kazuyuki Ichimura

Kazuyoshi Manabe

Noritsugu Umehara

Hiroyuki Kousaka

In an amorphous carbon film of a sliding member, provided that a number of nitrogen atoms each singly bonded to three carbon atoms is A, and a number of nitrogen atoms each singly and doubly bonded to two carbon atoms, respectively, is B, a value A/B of the amorphous carbon film obtained through X-ray photoelectron spectroscopy analysis is 10 to 18. The method includes irradiating the surface of the substrate with nitrogen ion beams and irradiating a carbon target with electron beams, thereby forming an amorphous carbon film on the surface of the substrate while vapor-depositing a part of the carbon target onto the surface of the substrate. The output of the electron beams that irradiate the carbon target is 30 to 50 W.

Growing community of inventors

Nagoya, Japan

Kazuyuki Ichimura