Horiba Stec, Co., Ltd.

Kazuya Tokunaga

Kotaro Takijiri

Jeffrey Ransdell

A flow rate control apparatus can obtain a flow rate of a fluid passing through a downstream-side valve in a form in which noise is significantly reduced with little time delay, and has improved responsiveness. The flow rate control apparatus includes: a downstream-side valve flow rate meter that measures a downstream-side valve flow rate that is a flow rate of a fluid passing through a downstream-side valve; and an observer including a downstream-side valve flow rate estimation model that estimates the downstream-side valve flow rate on the basis of an input parameter that changes an opening degree of the downstream-side valve. The observer is configured so as to be fed back a deviation between the measured value of the downstream-side valve flow rate and the estimated value of the downstream-side valve flow rate.

Flow rate control apparatus, flow rate control method, and program recording medium in which program for flow rate control apparatus is recorded

The present invention controls convergent pressure of a closed space provided with a fluid resistance at high speed while an upstream valve provided on the upstream of the fluid resistance prevents overshooting. A pressure control system is provided with a fluid resistance in a channel forming a closed space and is configured to control pressure of the closed space by controlling an upstream valve provided on the upstream of the fluid resistance. The pressure control system includes a convergent pressure arithmetic unit and a valve controller. The convergent pressure arithmetic unit calculates convergent pressure of the closed space when the upstream valve is fully closed using at least one of upstream pressure and downstream pressure on the fluid resistance in the channel. The valve controller compares the calculated convergent pressure with a predetermined target convergent pressure and fully close the upstream valve based on the result of the comparison.

Pressure control system, pressure control method, and pressure control program

Provided is a flow rate controller. The flow rate controller calculates a resistor flow rate that is a flow rate of a fluid flowing through a fluid resistor, on the basis of a first measured pressure measured by a first pressure sensor and a second measured pressure measured by a second pressure sensor; controls a second valve on the basis of a deviation of the resistor flow rate from the set flow rate; outputs a first set pressure that is a target of a pressure upstream of the fluid resistor, on the basis of the set flow rate and a second set pressure which is a target of a pressure downstream of the fluid resistor and to which a constant value is set; and controls the first valve on the basis of a deviation of the first measured pressure from the first set pressure.

Flow rate controller, flow rate control method, and program recording medium for flow rate controller

A flow rate control apparatus calculates a resistance flow rate, which is a flow rate of a fluid flowing through the fluid resistor, based on a first pressure measured by a first pressure sensor and a second pressure measured by a second pressure sensor, converts the resistance flow rate to a first valve flow rate, which is the flow rate of the fluid passing through a first valve, based on the first pressure, converts the resistance flow rate to a second valve flow rate, which is the flow rate of the fluid passing through a second valve, based on the second pressure, controls the first valve so that the deviation between a first set flow rate and the first valve flow rate becomes small, and controls the second valve so that the deviation between a second set flow rate and the second valve flow rate becomes small.

Flow rate control apparatus, flow rate control method, and program recording medium recording flow rate control program

A fluid control valve can suppress heat generation when discharging charges from a piezo actuator for contraction and reduce energy necessary to drive the piezo actuator. The fluid control valve includes a piezo actuator and a drive circuit connected to the piezo actuator is adapted so that the drive circuit includes: a flyback transformer including a primary side coil connected to a DC power supply DV and a secondary side coil connected to the piezo actuator; a charge switch that is connected to the primary side coil and switched from on to off when the piezo actuator charges; a discharge switch that is connected to the secondary side coil and switched from off to on when the piezo actuator discharges; and a regenerative capacitor that is connected to the primary side coil and into which electric energy due to the discharge of the piezo actuator is regenerated.

Growing community of inventors

Kyoto, Japan

Kazuya Tokunaga