Seiko Epson Corporation

Seiko Epson Corportion

Kazuya Kitada

Tomohiro Sakai

Koji Sumi

Tetsuya Isshiki

Yasuaki Hamada

Tsutomu Asakawa

Toshiaki Takahashi

Satoshi Kimura

Akio Ito

Tomokazu Kobayashi

Tsuneo Handa

Masayuki Omoto

Koji Ohashi

Koichi Morozumi

Hidemichi Furihata

Xiaoxing Wang

Takayuki Yonemura

Katsutomo Tsukahara

Masahisa Nawano

Harunobu Koike

Yoichi Tanaka

Takayuki Yokoyama

Yasumi Ikehara

Yasuto Kakemura

Kazuhide Gomi

Hidetoshi Tako

Yoshiki Yano

A piezoelectric element includes: a first electrode formed at a vibration plate; a seed layer formed at the first electrode; a piezoelectric film containing potassium, sodium, and niobium and formed at the seed layer; and a second electrode formed at the piezoelectric film. The piezoelectric film contains lithium and one or more first transition elements. The seed layer contains bismuth. When the piezoelectric film is divided into two equal parts in a stacking direction, the second electrode side is defined as a first region, and the first electrode side is defined as a second region, a bismuth intensity obtained by SIMS measurement at a boundary between the first region and the second region is equal to or less than 1/500 of a maximum bismuth intensity obtained by the SIMS measurement of the piezoelectric film.

Piezoelectric element, droplet dispensing head, actuator, and vibrator

A piezoelectric element according to the present disclosure includes: a first electrode; a piezoelectric layer formed at an upper part of the first electrode; and a second electrode formed at an upper part of the piezoelectric layer, in which the piezoelectric layer contains potassium, sodium, and niobium, and a Young's modulus of the piezoelectric layer measured by a nanoindentation method exceeds 130 GPa.

Piezoelectric element, head chip, liquid ejection device, and sensor

A piezoelectric body contains potassium, sodium, and niobium, and has a perovskite structure. A Raman shift of peaks assigned to Aobtained by performing Raman spectroscopic analysis on a plurality of measurement regions is 400 cmor more and 700 cmor less. A difference between a maximum value and a minimum value of the Raman shift among the peaks in the plurality of measurement regions is 11.0 cmor less.

Piezoelectric body, piezoelectric element, and liquid ejection head

A droplet discharging head executes multi-path recording in which dot recording in one main scanning line is completed by n main scans when n is an integer of 2 or more. The droplet discharging head includes: a plurality of nozzles configured to discharge a liquid as droplets; a pressure chamber defining substrate defining a pressure chamber communicating with the nozzles; a piezoelectric element including a first electrode, a second electrode, and a piezoelectric layer containing a perovskite-type composite oxide containing K, Na, and Nb as a main component; and a vibration plate forming a part of a wall surface of the pressure chamber and configured to vibrate by driving of the piezoelectric element. The number of paths n in the multi-path recording, a piezoelectric constant d[m/v] of the piezoelectric element, and a ratio x of a Na molar fraction to a total value of a K molar fraction and the Na molar fraction in the piezoelectric layer satisfy a relationship represented by a formula (1).

Droplet discharge head and droplet discharge apparatus

A piezoelectric element includes a substrate and a laminate which is provided on the substrate and which includes a first electrode, a seed layer, a piezoelectric layer, and a second electrode in this order, and the seed layer includes a composite oxide containing as a constituent element, lead, iron, and titanium.

Piezoelectric element, liquid ejection head, and liquid ejection apparatus

A piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are stacked on a substrate is provided. The piezoelectric element is a piezoelectric element in which the first electrode, the piezoelectric layer, and the second electrode are stacked in order on the substrate and includes an orientation control layer that is provided between the piezoelectric layer and the first electrode and that controls orientation of the piezoelectric layer and a titanium layer that is provided between the first electrode and the orientation control layer and that contains at least Ti.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A liquid discharge head includes a pressure chamber plate having a plurality of pressure chambers arranged in a first direction, a vibrating plate disposed at a position further than the pressure chamber plate in a second direction intersecting the first direction, at least one first electrode disposed at a position further than the vibrating plate in the second direction, a piezoelectric layer disposed at a position further than the first electrode in the second direction, and a second electrode disposed at a position further than the first electrode in the second direction. The piezoelectric layer has a first area that does not overlap the first electrode in the first direction and a second area that overlaps the first electrode in the first direction, and the first area exhibits a first preferred orientation and the second area exhibits the first preferred orientation when the piezoelectric layer is analyzed by X-ray diffraction.

Liquid discharge head and actuator

Provided is a piezoelectric element in which a first electrode, a seed layer, a piezoelectric layer, and a second electrode are laminated on a substrate, in which the seed layer is a composite oxide containing at least Pb, Bi, Fe, and Ti.

A piezoelectric element includes a piezoelectric layer formed as a stacked structure of first, second, and third piezoelectric films. The first piezoelectric film is formed on a first electrode. The second piezoelectric film is formed on the first piezoelectric film. The third piezoelectric film is formed on the second piezoelectric film. Each of the first, second, and third piezoelectric films includes potassium, sodium, and niobium. A second electrode is formed on the piezoelectric layer. A concentration of sodium in the first piezoelectric film is greater than a concentration of sodium in the second piezoelectric film. The concentration of sodium in the second piezoelectric film is greater than a concentration of sodium in the third piezoelectric film.

Piezoelectric element, piezoelectric element application device, and method of manufacturing piezoelectric element

A piezoelectric element includes a first electrode; a piezoelectric layer, placed on or above the first electrode, containing potassium, sodium, niobium, titanium, and oxygen; and a second electrode placed on or above the piezoelectric layer.

Piezoelectric element, method for manufacturing the same, and piezoelectric element-applied device

A piezoelectric element includes: a first electrode provided on a base; a piezoelectric layer provided on the first electrode and containing a complex oxide which has a perovskite structure and contains potassium, sodium, and niobium; and a second electrode provided on the piezoelectric layer, in which the first electrode contains platinum, the first electrode is (111) preferentially oriented, and a platinum atom contained in the first electrode is bonded to an oxygen atom at an interface between the first electrode and the piezoelectric layer.

Piezoelectric element, liquid discharge head, and printer

A piezoelectric element includes a first electrode provided at a base body, a piezoelectric layer provided at the first electrode and containing a composite oxide that contains potassium, sodium, and niobium and that has a perovskite structure, and a second electrode provided at the piezoelectric layer, wherein the first electrode is a platinum layer, the first electrode is preferentially oriented to (111), and the first electrode has an average crystal grain diameter of 200 nm or more.

Piezoelectric element, liquid ejection head, and printer

A piezoelectric element including a first electrode provided above a base body, a first piezoelectric layer provided so as to be in contact with the base body and cover the first electrode, a second piezoelectric layer provided above the first piezoelectric layer, and a second electrode provided above the second piezoelectric layer, wherein the first piezoelectric layer includes a composite oxide that contains potassium and niobium and that has a perovskite-type structure containing potassium as a main component at an A-site, the second piezoelectric layer includes a composite oxide that contains potassium, sodium, and niobium and that has a perovskite-type structure, and the first piezoelectric layer has a higher potassium atomic concentration (atm %) than the second piezoelectric layer.

Piezoelectric element and method for producing the same, liquid ejection head, and printer

A piezoelectric element includes: a first electrode and a second electrode; and a piezoelectric layer provided between the first electrode and the second electrode, where: the piezoelectric layer contains a complex oxide having a perovskite structure and including potassium, sodium, and niobium; on a cross-section of the piezoelectric layer, a standard deviation of values that are obtained by normalizing sodium atom concentrations in eight regions by an average value of the sodium atom concentrations in the eight regions is 0.140 or less; each of the regions includes a central line of the piezoelectric layer; each of the regions is a square having a size in a thickness direction of the piezoelectric layer and a size in a direction orthogonal to the thickness direction of 150 nm; and the eight regions are aligned in the direction orthogonal to the thickness direction.

A piezoelectric element includes a substrate, a first electrode formed on the substrate, a piezoelectric layer, which is a layered structure of a plurality of piezoelectric films each containing potassium, sodium, and niobium, formed on the first electrode, and a second electrode formed on the piezoelectric layer. A sodium concentration in the piezoelectric layer has a Na local maximum value, which is a local maximum value of the sodium concentration, in a first piezoelectric film, which is among the plurality of piezoelectric films, in the vicinity of the first electrode, a sodium concentration gradient decreasing from the Na local maximum value toward the second electrode, and a Na local minimum value, which is a local minimum value of the sodium concentration, near a boundary between the first piezoelectric film and a second piezoelectric film formed immediately above the first piezoelectric film.

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Suwa, Japan

Kazuya Kitada