Hitachi-High-Technologies Corporation

Kazutoshi Kajl

Takashi Aoyama

Shigeto Isakozawa

Shunroku Taya

An electron beam detector detects a peak of a spectrum, and when a peak position is deviated from a reference position on the electron beam detector, a controller for controlling an electron beam position on the electron beam detector is used to correct a deviation. An electron energy loss spectrum is measured while controlling correction a deviation between an electron beam position on a specimen, and a peak position of the spectrum, and a spectrum measuring with the electron beam detector.

Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method

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Hitachi, Japan

Kazutoshi Kajl