Nikko Materials Company, Limited

Shin-etsu Chemical Co., Ltd.

Nichigo-morton Co., Ltd.

Kazutoshi Iwata

Yoshiaki Honma

Takeshi Yamaguchi

Taihei Matsumoto

Grigoriy Basin

Kinya Kodama

Ryoichi Yasumoto

Basin Grigoriy

A laminating apparatus that prevents partial protrusion of a film during pressing and ensures the uniformity of the thickness of a resulting laminate is provided. The laminating apparatus includes a pressing device for pressing a substrate and a film (a workpiece). The pressing device includes a press block movable back and forth, a pressing plate mountable to the press block, a plurality of heat sources (cartridge heaters) capable of heating the pressing plate, and a control system set up to perform heating control on the heat sources. The heat sources are arranged so as to be able to separately heat a central portion of the pressing plate and a peripheral portion thereof annularly surrounding the central portion.

Laminating apparatus and laminating method using same

Provided is a laminating apparatus configured to improve the uniformity of the thickness of a laminate to be obtained to improve the yield of a product, such as a laminate. The laminating apparatus includes a pressing device including a first press block that is advanceable and retreatable, a second press block arranged to face the first press block, a first pressing rubber mounted inside the first press block, and a second pressing rubber mounted inside the second press block, the first pressing rubber and the second pressing rubber facing each other, the first pressing rubber having formed on a surface thereof facing the second pressing rubber a convex frame configured to surround a peripheral edge portion thereof.

Laminating apparatus

A laminating apparatus for improving the uniformity of the thickness of a resulting laminate to improve the yield of products such as laminates is provided. A pressing device includes: a first press block movable back and forth; a second press block disposed in opposed relation to the first press block; a first pressing plate mounted to the inside of the first press block; and a second pressing plate mounted to the inside of the second press block. The first pressing plate and the second pressing plate are opposed to each other. A surface of the first pressing plate which is opposed to the second pressing plate has a peripheral portion formed into a tapered surface in such a manner that the distance from the second pressing plate increases in an outward direction.

A laminating apparatus is provided, which is capable of producing a laminate having a highly planarized surface. The laminating apparatus is arranged to laminate a film on an irregular surface of a substrate having irregularities, and includes a vacuum laminating device which brings the film into close conformal contact with the substrate under reduced pressure to form a first temporary laminate, a first flat press device which presses the first temporary laminate to form a second temporary laminate having a substantially planarized irregular surface, and a second flat press device which presses the second temporary laminate under different conditions from the first flat press device to form a product laminate having a planar surface.

A laminating apparatus includes workpiece transport units, a vacuum laminating device and a flat press device. The flat press device includes a ball screw having a screw shaft and supporting a first one of a pair of pressing elements, a servomotor connected to the screw shaft of the ball screw, a gap measuring device (linear scale) for measuring a distance between the first pressing element and the second pressing element, and a pressing gap control system for moving the first pressing element to a position in which a predetermined gap is defined between the first pressing element and the second pressing element to stop the first pressing element at that position. The pressing gap control system changes the RPM of the servomotor, based on information on the distance between the first and second pressing elements which is provided from the gap measuring device.

A laminating apparatus for a provisionally laminated body is provided and is configured to form an end laminated body including one of a first resin film and a second resin film conforming to protruding and recessed portions of a substrate. The laminating apparatus may include first and second laminating mechanisms. The first laminating mechanism may include a first enclosed space forming receiver, a depressurizer, a heater, and a first pressure laminator to form an intermediate laminated body from the provisionally laminated body. The second laminating mechanism may include a second enclosed space forming receiver, and a second pressure laminator to form the end laminated body from the intermediate laminated body.

A laminating apparatus is provided which causes a resin film to completely conform to protruding and recessed portions of a substrate, and which makes the film thickness of the conforming resin film uniform on a stricter level. To this end, the laminating apparatus includes a laminating mechanism including: an enclosed space forming receiver capable of receiving a provisionally laminated body therein; and a pressure laminator for applying pressure to the provisionally laminated body in non-contacting relationship in an enclosed space formed by the enclosed space forming receiver to form an end laminated body from the provisionally laminated body.

Growing community of inventors

Kanagawa, Japan

Kazutoshi Iwata