Ckd Corporation

Tokyo Electron Limited

Kazutoshi Itoh

Takahiro Minatani

Keiichi Nishikawa

Yasuhisa Hirose

Atsushi Kobayashi

Atsuhiko Tabuchi

Hideki Wakai

Masayuki Kouketsu

Akihiro Ito

Yasunori Nishimura

Akiko Nakada

Akihito Sugino

Takashi Hosono

Sadayoshi Muto

A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Temperature control system, semiconductor manufacturing device, and temperature control method

An electromagnetic coil includes a conductor windingformed by winding a conductora plurality of times about a predetermined axis, and a ceramic layerformed through thermal spraying on an axial end surface of the conductor winding, and having a flattened surface. A maximal value tof thickness of the ceramic layeris set to three times or less a maximal value tof depth of the recesses formed at the surface of turns of the conductorat the axial end surface.

Electromagnetic coil, method of manufacturing electromagnetic coil, and electromagnetic actuator

A fluid mixing system capable of quickly stabilizing flow rates of a plurality of fluids to be mixed is arranged to mix the fluids and deliver a mixture thereof to a container. The system includes a plurality of on-off valves for the respective fluids and delivering the fluids to the container. The on-off valves are caused to open and close in order according to respective duty ratios each indicating an opening/closing ratio in a cycle.

Fluid mixing system and fluid mixing apparatus

A flow verification system is adapted to verify flow characteristics just after a flow control device starts flow control by verifying a flow rate in a gas piping system which includes a first cutoff valve, the flow control device installed downstream from the first cutoff valve, and a pressure sensor for measuring pressure downstream from the flow control device, flow verification is made based on the pressure measured by the pressure sensor. The flow verification system also includes a benchmark storage device for storing a benchmark which is calculated by integrating the pressure values measured by the pressure sensor during a normal flow control operation, and an abnormality detection device for detecting an abnormal flow of process gas.

Flow verification system and flow verification method

Growing community of inventors

Aichi, Japan

Kazutoshi Itoh