Seiko Epson Corporation

Kazutoshi Goto

Isao Yanagisawa

Hiroshige Owaki

Yasuo Inaoka

Takuma Okamuro

Yoshinao Miyata

Mutsuhiko Ota

Motonori Okumura

Tomoaki Takahashi

Satoshi Nakajima

Toshiaki Kori

Hiroki Honma

An alignment method includes: disposing an alignment mark provided to a positioned member and a reference mark provided to a surface of an alignment mask so that the alignment mark and the reference mark can face each other; capturing an image from the other surface side of the alignment mask, which is the opposite surface of the alignment mask from the surface where the reference mark is disposed, the image concurrently showing the alignment mark and the reference mark; performing a surface treatment on at least a region of the positioned member side of the alignment mask, which is captured as the image, rather than on the reference mark side thereof, the surface treatment providing a high contrast ratio to each alignment mark and reference mark on the captured image; and thereafter aligning the alignment mark with the reference mark, while checking the image.

Alignment method of liquid-jet head unit

There is provided a liquid ejecting head unit that includes a liquid ejecting head ejecting liquid by driving a pressure generating element. The liquid ejecting head unit includes: the liquid ejecting head that includes first wiring substrates each having a connection wiring electrically connected to the pressure generating element and a support member that supports at least two first wiring substrates in different positions; a second wiring substrate that is commonly connected to the connection wirings of a plurality of the first wiring substrates electrically; and a head substrate to which the second wiring substrate is electrically connected. A connection portion connected to the head substrate is aligned on one face side of the second wiring substrate.

Liquid ejecting head unit and liquid ejecting apparatus

A liquid ejecting head which includes a flow passage forming substrate that has pressure generating chambers which communicate with nozzles capable of ejecting a liquid, pressure generating elements which apply pressure to the pressure generating chambers in order to eject the liquid from the nozzles, lead electrodes that supply electric signals to the pressure generating elements, wiring substrates that supply the electric signals to the lead electrodes, and a supporting member that supports the wiring substrates so as to raise the wiring substrates from a surface of the liquid ejecting head having the lead electrodes provided thereon.

Liquid ejecting head and liquid ejecting apparatus

A liquid ejection head including: a head main body including: a cavity unit including a passage forming base plate forming a liquid passage from a common liquid chamber to a nozzle opening via a pressure chamber; and a pressure generating source generating a change of pressure of liquid in the pressure chamber to eject the liquid in the pressure chamber as a liquid droplet from the nozzle opening; and a case member to which the head main body is attached and which includes: a first member provided with a first atmosphere opening passage; and a second member laminated on the first member and provided with a second atmosphere opening passage, wherein the first and second atmosphere opening passages communicate with each other under the laminated state and are opened to atmosphere.

Liquid ejection head

A liquid-jet head includes: a plurality of head bodies, each having: a nozzle plate having a plurality of nozzles bored therein; a passage-forming substrate having a pressure generating chamber formed therein, which communicates with the nozzle and receives a pressure for use in ejecting a liquid droplet from a pressure generating element; and a head case disposed on the passage-forming substrate at a surface opposite to the nozzle plate and having paths for supplying liquid to the pressure generating chamber therethrough; and a fixing member bonded onto a side of the nozzle plate of each of the plurality of head bodies, to positionally fix the head bodies thereto at predetermined intervals, wherein a reinforcing portion made of a predetermined adhesive agent, which is charged in a clearance between the head bodies fixed to the fixing member, followed by setting, is disposed at the clearance.

Liquid-jet head and liquid-jet apparatus

An adjusting unit for making positional adjustment of the optical axis adjustment mask, based on the observation by the one optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed, and for making optical axis adjustment of the other optical axis, based on the observation by the other optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed.

Alignment apparatus and alignment method

The invention provides a liquid ejecting head alignment apparatus that is used for positional determination and adhesion of nozzle plates and a fixation member, each of the nozzle plates having nozzle openings through which each of a plurality of liquid ejecting heads ejects liquid and further having alignment marks for positional alignment, the fixation member holding the nozzle-plate side of the plurality of liquid ejecting heads. The liquid ejecting head alignment apparatus according to the invention includes: a mask made of a transparent material, the mask having reference marks each of which is aligned with the corresponding alignment mark; a spacer jig that is provided between the fixation member and the mask in such a manner that the reference marks and the alignment marks are opposed to each other with a space being left therebetween, one surface of the spacer jig being in contact with the fixation member; and a bifocal microscope having an optical axis and two optical systems that shares the optical axis, the optical axis being oriented from a face of the mask that is opposite to the spacer jig side thereof toward the alignment mark via the reference mark and the space, one of the optical systems being capable of focusing on the reference mark, and the other thereof being capable of focusing on the alignment mark.

Liquid ejecting head alignment apparatus and liquid ejecting head alignment method

An alignment apparatus, which is used when positioning and joining a plurality of workpieces relative to each other, each workpiece having a plurality of alignment marks for alignment, the alignment apparatus includes: a transparent mask provided with reference marks with which the alignment marks are aligned; a mirror disposed between the mask and the workpiece; an optical unit having an optical axis pointed in a direction of the mirror via the reference mark from a side of the mask opposite to the mirror, the optical unit enabling the reference mark and a virtual image of the reference mark reflected in the mirror to be observed simultaneously; and an adjusting unit for making optical axis adjustment of the optical axis, based on the observation by the optical unit, such that a real image of the reference mark and the virtual image of the reference mark reflected in the mirror are superposed.

A liquid-jet head, comprising: a nozzle plate having nozzle orifices bored therein; a passage-forming substrate provided with recesses including pressure generating chambers communicating with the nozzle orifices; piezoelectric elements provided on a surface of the passage-forming substrate via a vibration plate, each piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode; and a joining plate joined to the surface of the passage-forming substrate, where the piezoelectric elements are formed, via an adhesive layer comprising an adhesive agent, wherein a plurality of contact portions and a joining portion are provided in a region where the joining plate is joined to the passage-forming substrate, the plurality of contact portions are protruded at a predetermined height on the vibration plate, and are substantially contacted by the joining plate, and the joining portion has the adhesive layer of a thickness equal to or larger than the height of the contact portions.

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Matsumoto, Japan

Kazutoshi Goto