Fujikin Inc.

Tokushima University

Kazuteru Tanaka

Nobukazu Ikeda

Kouji Nishino

Masaaki Nagase

Michio Yamaji

Yoshihiro Deguchi

Masahiko Takimoto

Tadayuki Yakushijin

Keiji Hirao

Masayoshi Kawashima

Kaoru Hirata

Atsushi Hidaka

Masafumi Kitano

Takatoshi Nakatani

Kazuyuki Morisaki

Takashi Fukawa

Taiki Hattori

A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

Controller and vaporization supply device

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, a first light-transmission memberfor transmitting light from the light source to the measurement cell, a second light transmission memberfor transmitting light from the measurement cell to the photodetector, a lensA provided in the fluid unit, the lensA being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensorfor measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuitfor detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

Density measurement device

A Concentration measurement devicecomprises: a measurement cellhaving a flow path through which a gas flows, a light sourcefor generating incident light to the measurement cell, a photodetectorfor detecting light emitted from the measurement cell, a pressure sensorfor detecting a pressure of the gas in the measurement cell, a temperature sensorfor detecting a temperature of the gas in the measurement cell, and an arithmetic circuitfor calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient &#x3b1;, wherein the arithmetic circuitis configured to calculate the concentration using the extinction coefficient &#x3b1; determined on the basis of the output of the temperature sensor

Concentration measurement device

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, optical fibersandfor connecting the electric unitand the fluid unitand is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light sourceto the measurement cell and then emitted from the measurement cell by the photodetector, where optical connection partsandconnected to the optical fibersand the light sourceor the photodetectorare integrally provided in the electric unit

A concentration measuring devicecomprises: a measurement cellhaving a flow path, a light source, a photodetectorfor detecting light emitted from the measurement cell, and an arithmetic circuitfor calculating light absorbance and concentration of a fluid to be measured on the basis of an output of the photodetector, the measurement cell includes a cell body, a window portionfixed to the cell body so as to contact the flow path, and a reflective memberfor reflecting light incident on the measurement cell through the window portion, the window portion is fixed to the cell bodyby a window holding membervia a gasket, an annular sealing protrusionis provided on a first surface of the gasket for supporting the window portion, and an annular sealing protrusionis also provided on a support surfaceof the cell body for supporting the second surface opposite to the first surface of the gasket.

A concentration measurement device for measuring the concentration of a measured fluid within a measurement cell by detecting transmitted light that has passed through the measurement cell having a light incidence window and a light emission window disposed opposing to each other, comprising a reflected-light detector for detecting reflected light of the light incidence window.

A concentration measuring device includes a measuring cell having a flow passage and a translucent window, a light source for emitting light to the measuring cell through the window, a reflective member for reflecting light propagating through the measuring cell to the window, a light detector for detecting the light exiting from the window, a calculation part for calculating the concentration of the fluid on the basis of a detection signal from the light detector, and an optical device for guiding the light from the light source to the window and guiding the light from the window to the light detector.

Concentration measuring device

A concentration measurement device including at least one light source; a measurement cell for containing a fluid to be measured; a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell; a transmitted-light detector for detecting transmitted light that is the incident light having passed through the measurement cell; a non-incident light detector for detecting the non-incident light; and an arithmetic part for correcting a detection signal of the transmitted-light detector using a detection signal of the non-incident light detector.

Growing community of inventors

Osaka, Japan

Kazuteru Tanaka