Sharp Kabushiki Kaisha Corporation

501 Sharp Kabushiki Kaisha

Kazutaka Uda

Yasuhiko Inami

Masaya Hijikigawa

Takashi Sugihara

Hiroki Tabuchi

Masanori Watanabe

Shuhei Tsuchimoto

Shoei Kataoka

Masayuki Katagiri

Shuji Miyoshi

Hisatoshi Furubayashi

Nobuo Hashizume

A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.

Moisture-sensitive device

A sensor having a pair of sensor units, one of which is a detecting sensor unit and the other of which is a reference sensor unit, wherein each of the units comprises a substrate with a hollow portion, a thin insulating layer with a bridge, cantilever or diaphragm shape disposed on the substrate, a sensitive film disposed on the bridge, cantilever or diaphragm portion of the thin insulating layer, and a pair of electrodes being in contact with the sensitive film, the sensitive film section of the detecting sensor unit being exposed to an atmosphere to be measured so that the electrical resistance of the sensitive film changes with a variation in the physical quantity of the atmosphere to be detected, and the sensitive film section of the reference sensor unit being sealed within a shielding container so that the electrical resistance of the sensitive film is not influenced by a variation in the physical quantity of the atmosphere outside of the container, whereby the absolute physical quantity of the atmosphere to be detected is determined by the output power of the sensor based on a difference between the electrical resistance of the detecting sensor unit and the electrical resistance of the reference sensor unit.

Sensor

A variable interferometric device comprising a Fabry-Perot interferometer composed of a pair of reflecting substances facing each other with a space therebetween formed by spacers and a means for deforming at least one of the reflecting substances constituting said Fabry-Perot interferometer to thereby change the interferometric characteristics of said Fabry-Perot interferometer. Moreover, an optical sensor comprising a light source, a first Fabry-Perot interferometric device, the interferometric characteristics of which vary with the physical quantity of the object to be measured, a light-dividing means for dividing the light from the light source into a first light beam and a second light beam, a second Fabry-Perot interferometric device functioning as a reference standard, the operational conditions of which are set at fixed values, a first photodetector for receiving the first light beam from said light-dividing means through the second Fabry-Perot interferometric device, a second photodetector for receiving the second light beam from said light-dividing means through the second Fabry-Perot interferometric device, and a signal-processing circuit for comparing the output signal from the first photodetector with the output signal from the second photodetector to thereby determine the physical quantity of the object to be measured.

Variable interferometric device and a process for the production of the

A moisture sensitive material prepared by cross-linking cellulose acetate butyrate with at least one compound selected from the group consisting of compounds containing two or more isocyanate groups; copmpounds containing two or more epoxy groups; compounds containing two or more carboxyl groups; and acid anhydrides of carboxylic acids.

Moisture sensor containing cellulose acetate butyrate

A pressure sensitive element having a pair of light reflecting thin films formed through a thin film producing process and composing a Fabry-Perot resonator which is arranged so as to face a light transmitting system, and a diaphragm laminated on the light reflecting thin films, wherein an optical path difference is formed in accordance with an interval of an air gap located between the pairs of light reflecting thin films, while the interval of the air gap changes by the deformation of the diaphragm.

Growing community of inventors

Tenri, Japan

Kazutaka Uda