Ebara Corporation

Kazutaka Okuda

Takeshi Tsuji

Yuji Shirao

Rikiya Nakamura

Keiichi Ishikawa

Kotaro Kawamura

Yoshiro Takemura

Tetsuo Komai

Kohtaro Kawamura

Tomonori Ohashi

Tadakazu Nishikawa

Yasutaka Muroga

Hiroyuki Yamada

Yoshihiro Ueda

A scrubber removes dust from an exhaust gas. The scrubber includes a casing having an exhaust gas inlet and an exhaust gas outlet, an impeller housed in the casing and supported by a shaft, and a cleaning liquid supply tube for ejecting a cleaning liquid by which the dust contained in the exhaust gas is captured. The scrubber further includes a plurality of protrusions provided around the impeller such that the exhaust gas and the cleaning liquid which are discharged from the impeller impinge upon the protrusions.

Scrubber and exhaust gas treatment apparatus

A combustion type waste gas treatment system capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

Combustion type waste gas treatment system

The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiHand a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiOto be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone (), which is open toward a combustion chamber (), surrounded by a peripheral wall (), and closed by a plate () remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone (), and the mixed gases are ejected toward the combustion chamber () perpendicularly to the plate ().

Burner for treating waste gas

A waste gas treatment system having a burner part and a combustion chamber provided at a downstream side of the burner part. Combustion flames are formed from the burner part toward the combustion chamber, and a waste gas is introduced into the combustion flames, thereby oxidatively decomposing the waste gas. The combustion chamber is formed from an inner wall made of a fiber-reinforced ceramic material. Therefore, the wear of the inner wall due to heat and corrosion is minimized, and thermal stress cracking is also reduced. Consequently, the lifetime of the system increases, and the cost of equipment and the availability factor can be improved. In addition, because the inner wall exhibits no catalytic effect, the formation of thermal NOx is suppressed, and it is possible to achieve environmental preservation and to simplify the treatment equipment.

Exhaust gas treating device

A combustion type waste gas treatment system is capable of oxidatively decomposing a hazardous combustible waste gas while heating efficiently with a structure which allows the waste gas to mix with an auxiliary burning gas efficiently without the occurrence of backfire in a waste gas inlet pipe. The combustion type waste gas treatment system has a burner part and a combustion chamber. Combustion flames are formed to extend from the burner part toward the combustion chamber, and a combustible waste gas is introduced into the combustion flames from waste gas inlet pipes thereby oxidatively decomposing the waste gas. A flow velocity accelerating device makes the flow velocity of the combustible waste gas flowing through the waste gas inlet pipe higher than the burning velocity of the combustible waste gas.

A scrubber including a casing having an exhaust gas inlet and an exhaust gas outlet. An impeller is mounted in the casing, and the impeller is rotatable about its own axis. An exhaust gas can be introduced into the center of the impeller through the exhaust gas inlet of the casing. A cleaning liquid discharge nozzle is positioned at the center of the impeller for spraying a cleaning liquid in the impeller. Also, a baffle member is spaced apart from and surrounds the impeller. A mixture of the exhaust gas and the cleaning liquid exiting the impeller impinges on the baffle member. The cleaning liquid discharge nozzle is provided inside and rigidly connected to the impeller so as to rotate together with the impeller. The nozzle has a plurality of cleaning liquid discharge orifices extending radially through a cylindrical wall thereof to discharge a cleaning liquid into the impeller.

Scrubber

The present invention provides a burner for use in a combustion-type waste gas treatment system for combusting waste gases emitted from semiconductor manufacturing system, particularly, a deposition gas containing SiH and a halogen-base gas, simultaneously at a high efficiency of destruction, making it difficult for a powder of SiO to be attached and deposited, performing a low-NOx combustion, and maintaining a desired level of safety. The combustion-type waste gas treatment system has a flame stabilizing zone ( ), which is open toward a combustion chamber ( ), surrounded by a peripheral wall ( ), and closed by a plate ( ) remotely from the combustion chamber. A waste gas, an auxiliary combustible agent, and air are introduced into and mixed with each other in the flame stabilizing zone ( ), and the mixed gases are ejected toward the combustion chamber ( ) perpendicularly to the plate ( ).

Combustor for exhaust gas treatment

A waste gas treatment system has a primary cooling section provided at a stage subsequent to a decomposition treatment section in which a waste gas is subjected to decomposition treatment at high temperature. The primary cooling section has a liquid spray part for spraying a liquid on the treated gas from the decomposition treatment section. A secondary cooling section cools the treated gas sprayed with the liquid in the primary cooling section to reduce the volume of the treated gas. Further, a particle collecting section injects a liquid into the treated gas cooled in the secondary cooling section to collect fine particles contained in the treated gas.

Growing community of inventors

Tokyo, Japan

Kazutaka Okuda