Fuji Electric Corporate Research and Developement Ltd.

Kazusue Itoga

Takeshige Ichimura

A method of manufacturing a high efficiency solar battery and a high efficiency solar battery comprising a transparent electrode of SnO.sub.2, and a semiconductor layer and a metal electrode formed on the transparent electrode in the stated order. The surface unevenness of the transparent electrode is controlled by forming a dual layer structure. The layer adjacent the transparent substrate comprises an undoped SnO.sub.2 layer, having crystal grains growing substantially perpendicular to the substrate, producing an uneven surface. A doped layer containing impurities, such as F, Cl, and Sb is deposited over the undoped layer.

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Yokosuka, Japan

Kazusue Itoga