Ulvac, Inc.

Kazushige Komatsu

Kyuzo Nakamura

Koukou Suu

Masahisa Ueda

Toshiya Yogo

Takashi Kurimoto

Nobusuke Tachibana

An ashing device that prevents the ashing rate from changing over time. The ashing device ashes organic material on a substrate including an exposed metal in a processing chamber. The ashing device includes a path, which is formed in the processing chamber and through which active species supplied to the processing chamber pass. The path is defined by a surface on which the metal scattered from the substrate by the active species is collectible, with the surface being formed so as to expose a metal that is of the same kind.

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Kasugai, Japan

Kazushige Komatsu