Tokyo Electron Limited

Kazushi Tahara

Akira Obi

Shigeaki Kato

Akira Iwami

Hisato Tanaka

Hiroshi Nishikawa

Mitsuru Dohiwa

A parts management system which is capable of preventing use of a non-conforming part. A first computer for a user has component parts for an apparatus, delivered to the user. A second computer for a manufacturer is connected via a communication network to the first computer, and has a database provided therein which includes a list having fields for a plurality of kinds of management data for the apparatus component parts in association with each of ID numbers of the apparatus component parts. In the second computer, the management data on the apparatus component parts is acquired from the first computer via the communication network, and the acquired management data is compared with management data within the database.

Parts management system and method and parts management program and storage medium

According to the present invention, as processing apparatus drive starts, the operating state of software used to drive the processing apparatus is monitored in real time to diagnose whether or not an abnormality has occurred (S). If it is judged through the diagnosis performed in Sthat no abnormality has occurred, the workpiece processing is allowed to continue uninterrupted and then a decision is made as to whether or not the workpiece processing has been completed (S). If the processing has been completed, the processing apparatus is stopped (S). If, on the other hand, it is judged through the diagnosis performed in Sthat an abnormality has occurred, a log of the diagnosis item with regard to which the abnormality has occurred is recorded (S). The processing apparatus is then stopped (S).

Method of maintaining and automatically inspecting processing apparatus

Method of automatically resetting processing apparatus

Growing community of inventors

Yamanashi, Japan

Kazushi Tahara