Panasonic Intellectual Property Management Co., Ltd.

Kazushi Kataoka

Yuji Suzuki

Toru Baba

Jun Ogihara

Yoshiyuki Takegawa

Takafumi Okudo

Naoki Ushiyama

Hisanori Shiroishi

Kouji Gotou

Takashi Saijo

A semiconductor physical quantity sensor includes: a first base material; an electrode formed on the first base material; a diaphragm which bends in accordance with a physical quantity applied from the outside; a second base material fixed to the first base material and supporting the diaphragm such that the diaphragm is opposed to the electrode with a space (S) in between; and an insulator formed on a surface on the first base material side of the diaphragm. Moreover, a wall portion to define the space (S) is formed between the insulator and the electrode.

Semiconductor physical quantity sensor

Growing community of inventors

Mie, Japan

Kazushi Kataoka