Mitsubishi Petrochemical Company Limited

Kazuo Yorihiro

Masahiro Sasaki

Fumio Ohta

Tomonobu Tomita

Yoshinao Mukasa

This invention relates to an acceleration sensor having less output drift due to temperature change and noise due to external induction which includes a piezoelectric device formed of a piezoelectric member having one or more electrodes provided on each of sides thereof and a lining member of low linear expansion coefficient adhered to one side thereof. A low linear expansion coefficient circuit substrate is provided having the piezoelectric device adhered to one side thereof and having a signal processing electronic circuit formed on the other side thereof. A cabinet having three layers, including an internal conductive resin layer, an adiabatic resin layer, and an external conductive metal layer, completely enclose the piezoelectric device and the circuit substrate.

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Yokkaichi, Japan

Kazuo Yorihiro