Nissha Printing Co., Ltd.

Nissha Co., Ltd.

Kazuo Terasawa

Hiroaki Suzuki

Kazuhiro Nishikawa

Kazuhiko Takahata

Takeshi Asakura

Teppei Kimura

Hideki Murakami

Hajime Takemura

To extend the life of a MEMS gas sensor, the MEMS gas sensor includes an insulator, a gas sensitive material, a first oxide film and an interlayer insulating film, a heater wiring pattern, a lower protective film, and an upper protective film. The insulator includes a cavity. The gas sensitive material is provided corresponding to the cavity. The first oxide film and the interlayer insulating film are provided on the insulator and arranged to overlap each other in a plan view. The heater wiring pattern serves to heat the gas sensitive material and is disposed between the first oxide film and the interlayer insulating film. The lower protective film and the upper protective film cover, in direct contact, an upper surface, a lower surface, and a side surface of the heater wiring pattern.

MEMS gas sensor and method for manufacturing MEMS gas sensor

In an analog resistive-film touch panel, a lower electrode member has a transparent electrode on a top face of a transparent insulating base member, a pair of bus bars on parallel sides of the transparent electrode, and routing circuits connected to the bus bars for external connection on a portion other than the transparent electrode. Further, an upper electrode member has a transparent electrode on a bottom face of a flexible transparent insulating base, a pair of bus bars on parallel sides of the transparent electrode, and routing circuits connected to the bus bars for external connection on a portion other than the transparent electrode. The lower and upper electrode members face each other in a square pattern via an insulative spacer and are bonded at peripheral portions. The bus bars and the routing circuits are formed from metal thin wires with a diameter of 30 to 100 &#x3bc;m.

Thin-frame touch panel

Growing community of inventors

Kyoto, Japan

Kazuo Terasawa