Matsushita Electric Industrial Co., Ltd.

Kazuo Tazuke

Osamu Yamazaki

Kiyotaka Wasa

Kentaro Setsune

Junichi Inohara

In a method of manufacturing a surface-acoustic-wave device composed of, at least, a substrate through which a surface acoustic wave is propagated, the propagation velocity of the surface acoustic wave is adjusted by applying light directly to the surface of the substrate constituting the device or through a thin film of asymmetric lattice configuration deposited thereon by sputtering, the thin film having a thickness not exceeding a value of 0.03 times as large as the wavelength of the surface acoustic wave propagated through the substrate.

Method of manufacturing surface acoustic wave device

A surface acoustic wave transducer having a piezoelectric thin film, interdigital electrodes disposed on one side surface of said piezoelectric thin film and an apodized counter electrode disposed on the opposite-side surface of said piezoelectric thin film. The outline of the apodized counter electrode is composed of parallel edges parallel to fingers of the interdigital electrode and perpendicular edges perpendicular to the fingers. The parallel edges are positioned in gaps between the fingers, so as not to lie over the fingers. Such structure remarkably reduces the deviation of characteristics of the transducer due to the incomplete alignment of the counter electrode with the interdigital electrode.

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Nara, Japan

Kazuo Tazuke