Honda Giken Kogyo Kabushiki Kaisha

Jsr Corporation

Hoya Corporation

Honda Giken Kogyo K.k.

Honda Motor Co., Ltd.

Idemitsu Kosan Company, Limited

Japan Synthetic Rubber Co., Ltd.

Kazuo Inoue

Katsumi Sato

Masaaki Katoh

Yoshio Ajiki

Kenichi Nagahiro

Noriyuki Kishi

Hisao Igarashi

Tsuneo Konno

Osamu Kubota

Kentaro Kato

Minoru Matsuda

Michimasa Fujino

Hiroo Shimada

Ryo Narisawa

Tsuneo Otsuka

Masatoshi Suzuki

Tsuneo Endoh

Eitetsu Akiyama

Shizuo Yagi

Shunji Yano

Terukazu Kokubo

Masaya Naoi

Etsuo Noda

Mutsuhiko Yoshioka

Hitoshi Fujiyama

Koji Seno

Takashi Hanaoka

Hisasi Oguro

Shoichi Sano

Tsutomu Hayashi

Suguru Yoshida

Masami Ogura

Toshihiko Sato

Hiroshi Sono

Takashi Shinozaki

Hajime Kajiwara

Masahiro Nakagawa

Katsunori Nakamura

Tetsuo Yamagata

Masahisa Kosaka

Kenji Hamabe

Kiyohiro Saito

Takashi Moriya

Eiichi Yajima

Masaki Ueyama

Hiroshi Kogure

Tsuneo Endo

Takashi Komura

Yoshitoshi Sakurai

Masao Kubodera

Tadayoshi Uehara

Koji Yamaguchi

Hiroshi Irino

Masakatsu Miyao

Ryoji Setaka

Toshinobu Hata

Takashi Bannai

Atsushi Katoh

Yasuhito Sato

Kunio Sasaki

Masato Hayama

Yoshinobu Ono

Morimasa Nagata

Fusao Tateishi

Takayuki Hirayama

Tomoyoshi Matsuno

Tsuyoshi Yamakoshi

Tetsuo Gotou

Harumi Taketomi

Hisayoshi Aoki

Tohru Fujihira

Yuva Otsuka

Misa Mishna

Ryuji Wada

Akio Imahashi

Isao Terabe

Yoshiro Hirose

Mitsuo Sugimura

Takeshi Sakamoto

Hideo Yamaji

Ryouji Setaka

Masahiro Hashiguchi

Naomi Warashina

An electronic part includes a first electronic member having a wiring side. An anisotropic conductive sheet has a first side and a second side opposite to the first side and is disposed on the first electronic member so that the wiring side contacts the first side. A second electronic member has a third side and a fourth side opposite to the third side and is disposed on the anisotropic conductive sheet so that the second side contacts the third side. The second electronic member is electrically connected to the first electronic member through the anisotropic conductive sheet. An elastic body has a fifth side and a sixth side opposite to the fifth side and is disposed on the second electronic member so that the fourth side contacts the fifth side. A pressing member is disposed on the sixth side of the elastic body.

Electronic part, electronic member connection method, and circuit connection member

A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

Sheet-like probe, method of producing the probe, and application of the probe

A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.

A probe device including a circuit board for inspection having a great number of inspection electrodes, a probe card having a circuit board for connection having a great number of terminal electrodes and a contact member, an anisotropically conductive connector arranged between the circuit board for inspection and the circuit board for connection and electrically connecting the respective inspection electrodes to the respective terminal electrodes, and a parallelism adjusting mechanism for adjusting a parallelism of the circuit board for inspection and the circuit board for connection to the wafer. The parallelism adjusting mechanism includes a location-varying mechanism, which relatively displaces the circuit board for inspection or the circuit board for connection in the thickness-wise direction of the anisotropically conductive connector. A wafer inspection apparatus can include the probe device.

Probe apparatus, wafer inspecting apparatus provided with the probe apparatus and wafer inspecting method

An anisotropically conductive sheet which does not contaminate an object of connection, does not adhere to the object of connection even when it is left to stand for a long period of time in a state pressurized by the object of connection under a high-temperature environment and can prevent or inhibit electric charge from being accumulated to eliminate an adverse influence by static electricity, a production process thereof, and applications thereof. The anisotropically conductive sheet has an anisotropically conductive sheet body formed by an elastic polymeric substance and having a plurality of conductive parts extending in a thickness-wise direction of the sheet body and an insulating part mutually insulating these conductive parts, and a DLC film integrally formed on one or both surfaces of the anisotropically conductive sheet body so as to cover at least the insulating part.

Anisotropic conductive sheet, its manufacturing method, and its application

Disclosed herein are a sheet-like probe capable of surly preventing positional deviation between electrode structures and electrodes to be inspected by temperature changes in a bum-in test, even when the object of inspection is a wafer having a large area of 8 inches or greater in diameter or a circuit device, the pitch of electrodes to be inspected of which is extremely small, and thus capable of stably retaining a good electrically connected state, and a production process and applications thereof. The sheet-like probe of the present invention comprises a contact film obtained by holding a plurality of electrode structures arranged in accordance with a pattern corresponding to respective electrodes to be connected and having a front-surface electrode part exposed to a front surface and a back-surface electrode part exposed to aback surface by an insulating film composed of a flexible resin, and a frame plate supporting the contract film.

Sheet-like probe, process for producing the same and its application

An anisotropically conductive connector suitable for use in a wafer inspection apparatus, and a wafer inspection apparatus comprising the anisotropically conductive connector, which anisotropically conductive connector comprises an elastic anisotropically conductive film composed of a plurality of conductive parts for connection and an insulating part formed among these conductive parts for connection, and a frame plate for supporting this film, which plate is formed of a metallic material having a coefficient of linear thermal expansion of 3&#xd7;10to 2&#xd7;10K, the conductive parts for connection are obtained by filling conductive particles having a number average particle diameter of 20 to 80 &#x3bc;m and exhibiting magnetism in an elastic polymeric substance at a high density, the conductive particles have, on a surface of which, a coating layer composed of a noble metal and having a thickness of at least 20 nm, each of the conductive parts for connection has a durometer hardness of 10 to 35, and an electric resistance between the conductive parts for connection is at least 10 M&#x3a9;.

Anisotropic conductive connector and wafer inspection device

An annular insert () is arranged in the optical component molding cavity of a mold to surround an outer periphery of raw material resin in a direction in which the resin is distributed in the cavity to limit the distribution of the raw material resin and define an outer profile of a lens (L). With this arrangement, it is only necessary to provide raw material resin only by a quantity equal to the volume of the region surrounded by the molding surfaces of upper and lower mold inserts () and the inner peripheral edge of the annular insert () of the mold, so that the required volume of the raw material resin can be reduced. Since the pressure is preserved at the outer periphery of the distributed resin by the presence of the annular insert (), the residual strain of the resin is minimized to prevent generation of sink mark, thereby providing excellent optical characteristics on the lens (L).

Method and device for producing optical part

An anisotropically conductive connector, by which positioning, and holding and fixing to a wafer to be inspected can be conducted with ease even when the wafer has a large area, contains a frame plate having a plurality of anisotropically conductive film-arranging holes formed corresponding to regions of electrodes to be inspected of a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes and supported by the inner peripheral edge thereabout.

Anisotropically conductive connector and production process thereof, and probe member

Disclosed herein are a sheet-like connector that electrode structures each having a front-surface electrode part small in diameter can be formed, a stable electrically connected state can be surely achieved even to a circuit device, on which electrodes have been formed at a small pitch, and the electrode structures are prevented from falling off from an insulating sheet to achieve high durability, and a production process and applications thereof. The sheet-like connector of the invention has an insulating sheet and a plurality of electrode structures arranged in the insulating sheet and extending through in a thickness-wise direction of the insulating sheet. Each of the electrode structures is composed of a front-surface electrode part exposed to a front surfaces of the insulating sheet and projected from the front surface of the insulating sheet, a back-surface electrode part exposed to a back surface of the insulating sheet, a short circuit part continuously extending from the base end of the front-surface electrode part through the insulating sheet in the thickness-wise direction thereof and linked to the back-surface electrode part, and a holding part continuously extending from a base end portion of the front-surface electrode part outward along the front surface of the insulating sheet.

Sheet-form connector and production method and application therefor

An anisotropically conductive connector, and applications thereof, by which good conductivity is retained over a long period of time even when it is used in electrical inspection of a plurality of integrated circuits formed on a wafer repeatedly over a great number of times, and thus high durability and long service life are achieved. The anisotropically conductive connector includes elastic anisotropically conductive films, in each of which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film are formed. The conductive particles contained in the conductive parts for connection in the anisotropically conductive connector are obtained by laminating surfaces of core particles exhibiting magnetism with a coating layer formed of a high-conductive metal, and the coating layer is a coating layer having a high hardness.

Anisotropic conductive connector, conductive paste composition, probe member, wafer inspection device and wafer inspection method

An anisotropically conductive connector, by which expected electrical inspection can be conducted even to a circuit device having a clock frequency of, for example, at least 1 GHz, and an electrical inspection apparatus for circuit devices, which is equipped with this connector. The anisotropically conductive connector includes an elastic anisotropically conductive film having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in a thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection, wherein conductive parts for high-frequency shielding extending in the thickness-wise direction are formed in the elastic anisotropically conductive film. The electrical inspection apparatus for circuit devices includes the above anisotropically conductive connector.

Anisotropic conductive connector and circuit-device electrical-inspection device

Anisotropically conductive connector, its manufacture method and probe member

The invention provides a method of effectively dyeing a thermoplastic resin plastic lens in any desired color tone and density as well as a colored plastic lens made by the method. The method involves dipping a thermoplastic resin plastic lens in a dyeing liquid containing one or more disperse dyes and one or more monocyclic monoterpenes.

Method of dyeing thermoplastic resin article and colored plastic lens obtainable by that method

Disclosed herein are a wafer inspection apparatus which is small in size, prevented from shortening the service life of its circuit board for inspection, can collectively perform inspection as to a great number of electrodes to be inspected, has good electrical properties and can perform electrical inspection of high functional integrated circuits, and an anisotropically conductive sheet suitable for use in this wafer inspection apparatus. The anisotropically conductive sheet is composed of an insulating sheet body, in which a through-hole has been formed, and an elastic anisotropically conductive film arranged in the through-hole. The insulating sheet body is formed of a material having a modulus of elasticity of 1&#xd7;10to 1&#xd7;10Pa, a coefficient of linear thermal expansion of 3&#xd7;10to 3&#xd7;10Kand a saturation magnetization lower than 0.1 wb/m, the elastic anisotropically conductive film is composed of a plurality of conductive path-forming portions and insulating portions formed among these conductive path-forming portions, the conductive path-forming portions are obtained by filling conductive particles having a number average particle diameter of 30 to 150 &#x3bc;m, a coating layer composed of a noble metal and having a thickness of at least 20 nm is formed on surfaces of the conductive particles, each of the conductive path-forming portions has a durometer hardness of 15 to 45, and an electric resistance between conductive path-forming portions is at least 10 M&#x3a9;.

Anisotropic conductive sheet and wafer inspection device

Growing community of inventors

Tokyo, Japan

Kazuo Inoue