Matsushita Electronics Corporation

Kazuo Hayama

Toshitaka Hibi

A method for fabricating a semiconductor device includes the steps of: forming a doped layer of a first conductivity type within a surface region of a semiconductor substrate; forming a recess by depositing an insulating film on the semiconductor substrate and then removing at least the insulating film in a region thereof where a gate electrode is to be formed; forming a gate insulating film on the surface of the semiconductor substrate, which is exposed inside the recess; and forming the gate electrode by filling in the recess with a conductive film.

Growing community of inventors

Osaka, Japan

Kazuo Hayama