Other

Tokyo Electron Limited

Fujikin Inc.

Kazuo Fukazawa

Nobukazu Ikeda

Kouji Nishino

Michio Yamaji

Ryousuke Dohi

Atsushi Matsumoto

Akihiro Morimoto

Takashi Hirose

Jun Hirose

Yukio Minami

Kazuhiko Sugiyama

Hiroshi Koizumi

Eiji Ideta

Tomio Uno

Satoshi Kagatsume

Hideki Nagaoka

Toyomi Uenoyama

Katsunori Yonehana

Tadahiro Ohmi

A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &#x394;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

Growing community of inventors

Nirasaki, Japan

Kazuo Fukazawa