Seiko Instruments Inc

Hitachi High-tech Science Corporation

Sii Nanotechnology Inc.

Kazuo Chinone

Satoshi Nakayama

Akikazu Odawara

Keiichi Tanaka

Toshimitsu Morooka

Atsushi Nagata

Hiroshi Yamakawa

Nobuhiro Shimizu

Noboru Ishikawa

Kazutoshi Watanabe

Norio Chiba

Masafumi Watanabe

Masatsugu Shigeno

Tatsuaki Ataka

Hiroyoshi Yamamoto

Tatsuji Ishikawa

A radiation analysis apparatus includes an excitation source unit irradiating an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation, a radiation detection unit including three or more radiation detectors that detect a second radiation generated from the object irradiated with the first radiation, a radiation focusing unit disposed between the object and the radiation detection unit, and focusing the second radiation, a position changing unit changing a relative positional relationship between the radiation focusing unit and the radiation detection unit, and a control unit controlling the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information indicating a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

Radiation analysis apparatus

A radiation analyzing apparatus includes a radiation irradiation unit configured to irradiate an object with a first radiation, a radiation detection unit configured to detect a second radiation generated from the object irradiated with the first radiation, a radiation converging unit configured to disposed between the object and the radiation detection unit and to converge the second radiation on the radiation detection unit, a position changing unit configured to vary a relative positional relationship between the radiation converging unit and the radiation detection unit, and a driving unit configured to change the positional relationship.

Radiation analyzing apparatus and radiation analyzing method

According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

Scanning probe microscope and probe contact detection method

An X-ray analyzer includes: an excitation source for exciting a sample to radiate a characteristic X-ray; an X-ray detector that detects the characteristic X-ray; a collimator; at least one window that is provided between the sample and the X-ray detector and allows the characteristic X-ray to pass through; and a cooling unit that cools the window, wherein the window is laminated with one or more layer of an aluminum film and one or more layer of an insulating film, wherein a total thickness of the aluminum film of the at least one window is equal to or greater than 150 nm and is less than 300 nm, and wherein a size of the collimator is set such that a quantity of radiant heat to the X-ray detector of the atmospheric temperature when the window is not present is equal to or less than 10 &#x3bc;W.

X-ray analyzer

An X-ray analysis device includes an electron gun, an X-ray optical member, a first detection unit and a second detection unit, and a distance changing mechanism. The X-ray optical member guides characteristic X-rays emitted from a sample to at least any one of the first detection unit or the second detection unit. The first detection unit is formed such that energy resolution is given relative priority over counting efficiency in contrast to the second detection unit. The second detection unit is formed such that counting efficiency is given relative priority over energy resolution in contrast to the first detection unit. The distance changing mechanism changes the distance between each of the first detection unit and the second detection unit and the X-ray optical member in an axial direction of an optical axis of the X-ray optical member.

X-ray analysis device

A radiation detector comprises an energy/electricity converter having a detection area for detecting incident radiation, and electrodes connecting the converter to an external driving circuit for driving the converter to convert energy of the incident radiation detected by the detection area of the converter into an electric signal. A collimator is integrally connected to the converter and has an opening for transmitting radiation to irradiate the detection area of the converter and portions for preventing radiation from irradiating a part of the converter other than the detection area. A spacer is integrally connected to the collimator and the converter for maintaining a preselected distance between the collimator and the detection area of the converter.

Radiation detector

In a nondestructive method of quantitatively evaluating a degree of plasticity of ferromagnetic materials, a magnetic field of a surface of a ferromagnetic test body is measured using a magnetic sensor, and the surface of the ferromagnetic test body is partitioned into regions corresponding to domains of the ferromagnetic test body. A difference between a maximum value and a minimum value of a magnetic signal corresponding to the magnetic field for each of the domains is calculated as a spatial difference amount. A distribution width of the spatial difference amounts and an amount of residual strain corresponding to an amount of plastic deformation of the ferromagnetic test body is measured. A correlation between the distribution width of the spatial difference amounts and the amount of residual strain is calculated. A degree of plasticity of the ferromagnetic test body in calculated in accordance with the correlation.

Nondestructive method of quantitatively evaluating degree of plasticity

A detecting coil of a SQUID is made of a superconductive film material having a critical temperature higher than a critical temperature of a superconductive film material composing a Josephson junction part. It is possible to measure the sample even when its temperature is higher than the critical temperature of the Josephson junction section by increasing the critical temperature of the detecting coil than that of the Josephson junction section.

Superconducting quantum interference device and non-destructive

To provide an effective method of nondestructively and easily judging plasticization of steel used in a real construction. A magnetic sensor 10 is made to scan along the surface of steel to detect a magnetic field caused by a magnetic anisotropy induced by plastic deformation of the steel, and the existence and position of the plasticization is judged from the state of distribution of the magnetic field. As a magnetic sensor, a differential type one comprised of detection coils 10a and 10b, the winding directions of which are opposite to each other, is used to compensate a magnetic field intrinsic to the steel.

Method of detecting plastic deformation in steel using a differential

A nondestructive inspection apparatus having a SQUID is made with compact configuration and is capable of detecting a metallic or non-metallic metal for defects, corrosion, and the like, by forming the SQUID and a magnetic field applying coil on the same substrate. The SQUID comprises two Josephson junctions, a washer coil connected to the Josephson junctions to form a superconducting loop, shunt resistors, a damping resistor, and a feedback modulation coil, all of which are formed from a superconducting thin film on a supporting substrate. A magnetic field applying coil is formed on the same supporting substrate with a superconducting thin film or a normal conducting metal thin film. The magnetic field applying coil, which generally has plural turns around the SQUID, applies a dc or ac magnetic field to a sample. The change in magnetic field caused by a defect in the sample is detected by the washer coil, and the position and size of the defect may thus be determined. Since the magnetic field applying coil is integrated on the same substrate as that on which the SQUID is formed, the apparatus may be made compact.

Superconducting quantum interference device fluxmeter and nondestructive

To provide a nondestructive inspection apparatus with a reduced distance between a superconducting magnetic sensor and an object under inspection, a cryostat for cooling the sensor to a superconducting state is provided with inner and outer vessels. The inner vessel has a baseplate on which the magnetic sensor is disposed, and has an inner wall defining a central chamber for containing a refrigerant for cooling the magnetic sensor. The outer vessel has an inner wall defining a central chamber for containing the inner vessel, the magnetic sensor and the stage. A gap between the inner and outer vessels is evacuated to insulate the inner chamber from the ambient atmosphere. To facilitate ease of transferring an object to and from the stage for inspection, a load lock area is provided adjoining the outer vessel. The load lock has a movable inner wall portion opening to the inner chamber of the outer vessel and a movable outer wall portion opening to the ambient atmosphere so as to permit the transfer of an object to be inspected to and from the stage.

Nondestructive inspection apparatus with superconducting magnetic sensor

In order to enhance the sensitivity of a nondestructive testing system, a pair of superconducting coils are disposed in the same plane such that a current flowing through the respective coils when exposed to a uniform magnetic field cancels out. As a result of this configuration, the detection coils are immune to noise, offset fields or other uniform ambient phenomena. In one embodiment, the nondestructive testing unit includes a plurality of detection coils, a SQUID having a pair of connectors for connection to the detection coils, a probe for supporting the detection coils and the SQUID in a coolant, a cryostat for supporting the probe and for keeping the coolant constant, a controller for processing a signal transmitted from the SQUID, and a display device for displaying the result of the processing. At least two detection coils are disposed in the same plane, are directly connected to the SQUID and are integrated on a semiconductor substrate.

Nondestructive testing system using a SQUID

A superconducting loop is formed by two Josephson junctions connected to both ends of a washer coil which serves also as a pick-up coil. The washer coil which is a magnetic field detection portion is constituted by two coils, i.e., a coil having a radius r.sub.1 and a number of turns n.sub.1 and a coil having a radius r.sub.2 and a number of turns n.sub.2 which are in the form of concentric circular loops. The two coils are coupled in opposite directions and are designed so that effective areas n.sub.1 .pi.r.sub.1.sup.2 and n.sub.2 .pi.r.sub.2.sup.2 are equal to each other. Since a magnetic field is directly detected by the washer coil, sensitivity to a magnetic field is enhanced. This makes it possible to obtain sufficient sensitivity to a magnetic field even if the area of the magnetic field detection portion is reduced to improve spatial resolution. It is, therefore, possible to realize a radial differential SQUID magnetic flux meter which has good spatial resolution and coil balance and which is suitable for mass production.

Radial differential squid magnetic flux meter

A method of manufacturing a DC superconducting quantum interference device comprises forming an insulating film over a portion of a resistance film. A lower electrode superconducting film is formed over the resistance film and the insulating film. A barrier layer is formed on a portion of the lower electrode superconducting film. An upper electrode is formed sandwiching the barrier layer between the lower electrode superconducting film and the upper electrode, so as to form a Josephson junction. To reduce the number of manufacturing steps, the lower electrode superconducting film is photolithographically patterned and/or etched to simultaneously form an input coil, a feedback coil and the Josephson junction. In another embodiment, after forming the upper electrode, an insulating film is formed over at least a portion of the lower electrode superconducting film. A superconducting film is formed over the insulating film in contact with the upper electrode. To reduce the number of manufacturing steps, the superconducting film is photolithographically patterned and/or etched to simultaneously form a counter electrode, the input coil and the feedback coil.

Growing community of inventors

Chiba, Japan

Kazuo Chinone