Fujitsu Corporation

Fujitsu Tohoku Electronics

Kazunori Okuyama

Koji Nozaki

Minoru Hirose

Tetsuya Hayashi

Tsuyoshi Inomata

A semiconductor device producing apparatus includes a first transporter which moves a substrate to a first unit to undergo at least a first process, and a second transporter, other than the first transporter, which moves the substrate to a second unit, to undergo at least a second process.

Apparatus for producing semiconductor device

A semiconductor device producing method includes the steps of (a) subjecting a substrate which is transported by first transport means to at least a first process within a first unit, and (b) subjecting the substrate which is subjected to the step (a) and is transported by second transport means other than the first transport means to at least a second process within a second unit.

Growing community of inventors

Aizuwakamatsu, Japan

Kazunori Okuyama