Saginomiya Seisakusho, Inc.

The University of Tokyo

Shizuoka University

Kabushiki Kaisha Saginomiya Seisakusho

Omron Corporation

Kazunori Ishibashi

Hisayuki Ashizawa

Gen Hashiguchi

Hiroyuki Mitsuya

Hiroyuki Fujita

Masato Suzuki

Hiroshi Toshiyoshi

Yuki Nishimori

Shinichi Arioka

Kazuya Takimoto

Hiroshi Imamoto

Takuro Ishikawa

Hideaki Koga

Masatoshi Oba

Tatsuhiko Sugiyama

Takahiro Kobayashi

Akito Mori

A vibrational energy harvester element includes: a first electrode; a second electrode that moves in a predetermined direction with respect to the first electrode; a third electrode; a fourth electrode that moves in the predetermined direction with respect to the third electrode; and a support portion that supports the second electrode and the fourth electrode so that they are movable along the predetermined direction; and wherein: the first electrode and the third electrode are disposed along the predetermined direction; at least one of facing surfaces of the first electrode and the second electrode, and at least one of facing surfaces of the third electrode and the fourth electrode, are electrically charged; and the support portion supports the second electrode and the fourth electrode in a state in which electrostatic force between the first electrode and the second electrode, and electrostatic force between the third electrode and the fourth electrode are balanced along the predetermined direction.

Vibrational energy harvester element

A vibration energy harvester includes: a first electrode; and a second electrode that can be displaced relative to the first electrode along a predetermined vibrating direction. At least either of a surface of the first electrode and a surface of the second electrode facing opposite each other is electrically charged. Power is generated as the second electrode becomes displaced causing a change in electrostatic capacitance between the first electrode and the second electrode. A range having included therein at least a vibrational center of the second electrode, over which the electrostatic capacitance remains unchanged even as the second electrode is displaced, is set.

Vibration energy harvester

An electret element includes: an Si layer, an SiOlayer formed at a surface of the Si layer; and an electret formed at the SiOlayer near an interface of the SiOlayer and the Si layer.

Electret element, electromechanical converter and method for manufacturing electret element

An electret element includes: an electret film that contains silicon oxide; and a protective film formed over the electret film and constituted of aluminum oxide deposited through an atomic layer deposition method.

Electret element, microphone having electret element mounted therein and electret element manufacturing method

Provided is a pressure detection unit in which a waterproof property can be improved. In a pressure sensor, a sealing-resin portion is joined to an outside side surface of an element main body made of stainless steel, aluminum, or nickel such that the sealing-resin portion surrounds a plurality of lead pins. In the pressure sensor, a roughened annular surface portion is provided at a region where the sealing-resin portion is joined on an upper end surface of the element main body so as to be disposed in a manner to partition an external peripheral edge and an internal peripheral edge arranged at the outside side surface of an element main body in the sealing-resin portion.

Pressure detection unit

An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

Actuator, shutter device, fluid control device, switch, and two-dimensional scanning sensor device

Growing community of inventors

Sayama, Japan

Kazunori Ishibashi