Kabushiki Kaisha Yaskawa Denki

Kazunori Hino

Ryuji Ando

Hiroki Sanemasa

Kazunari Shiraishi

Hitoshi Wakizako

Yukito Sagasaki

Ken-ichi Motonaga

Akihiro Furutani

Shinichi Katsuda

Katsuhiko Shimada

A robot system according to an aspect of the embodiments includes a plurality of work holding units and a heat insulating member. The work holding units each hold a work to be conveyed on one surface and are arranged vertically one over another in some cases during conveying of the work. The heat insulating member is provided on another surface side of at least one of the work holding units.

Conveying robot

A transfer system according to an embodiment includes a robot and a determination unit. The robot includes robot hands that hold a workpiece in a thin plate shape and that are located at different heights. The determination unit determines the robot hands that hold the workpiece based on a combination of temperature of the workpiece to be held by each of the robot hands.

Transfer system

A robot hand according to embodiments includes a holding unit, a bottom end, an optical sensor, and a reflecting member. The holding unit holds a thin-plate-shaped workpiece. In the bottom end, its leading part is coupled to the holding unit and its tail part is rotatably coupled to an arm. The optical sensor is provided in the bottom end and has a projector and a photoreceiver. The reflecting member is provided in the holding unit. The reflecting member reflects light from the projector, makes it pass through the holding area of the workpiece, and makes it reach the photoreceiver to form an optical path.

Robot hand and robot

A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least one of the supporting units rotates while abutting on the peripheral border of the board.

A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a first joint and a second joint; and a fork including its base end portion supported by the tip end portion of the second arm to be rotatable about a third joint. The first arm includes a first enlarged portion, formed in its tip end portion, with an upper surface positioned higher than an upper surface of the base end portion of the first arm. The second arm includes a second enlarged portion, formed in its tip end portion, with a lower surface positioned lower than a lower surface of the base end portion of the second arm. The first and the second enlarged portion are at least partially overlapped with each other horizontally.

Horizontal articulated robot and substrate transfer system provided with the same

A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.

Transfer robot and inspection method for thin substrate

A wafer carrying fork on which a wafer rests and carried and which comprises a wafer resting surface (,) provided on the top surface of a wafer carrying fork (,), and two steps (,) provided on the outer sides of the wafer resting surface (,) in a stepwise manner and having a height to width ratio of 1:0.5 to 1:2. Accordingly, it is possible to have a wafer (,) surely rest on the wafer carrying fork (,), even when the wafer (,) gets out of position in a wafer cassette, to convey it without failing.

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Fukuoka, Japan

Kazunori Hino