Nec Corporation

Kazunori Fujii

Mamoru Iguchi

In a production line simulator, an evaluation value of parameter adapted for real data (standard time as a processing period in processing a certain product by a certain production facility through a certain production process) computed at high reliability. From event reported from each production facility in a production line, a process period of the certain product by the certain production facility through the certain production process is derived for deriving the evaluation value on the basis of the derived process period. For deriving the evaluation value, an accumulated data in a is sorted sequential order of values. Then, a first center value is determined on the basis of result of sorting, and data on which an absolute value of a difference with the first center value becomes smaller is detected. A zone where number of the data to be detected exceeds half of all data number, is set. Then a new second center value of data is derived within the set zone, for comparing a difference between the second center value and the first center value with a convergence judgment reference value preliminarily set close to zero and determining whether the second center value can be regarded as the evaluation value on the basis of result of comparison. By this the evaluation value well reflecting distribution condition of live data can be obtained.

Evaluation value computing system in production line simulator

A semiconductor device manufacturing apparatus includes a processing device, a measuring device, and a data server. The processing device performs a lithography process and outputs process record data containing product information about a semiconductor device and process information. The measuring device measures a record offset from a target value in the semiconductor device processed by the processing device, and outputs measurement record data. The data server stores the process record data from the processing device and the measurement record data from the measuring device, calculates a correction value on the basis of a past record offset in response to a request from the processing device, and sends it back to the processing device. The data server has a data storage unit for storing the process record data and the measurement record data, a data arrangement unit for arranging the data stored in the data storage unit in accordance with stratification conditions, and determining target data from the data arranged by stratum on the basis of new process record data from the processing device, and a correction value calculation unit for performing calculation for the target data to obtain a correction value.

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Tokyo, Japan

Kazunori Fujii