Kabushiki Kaisha Yaskawa Denki

Other

Kazunari Shiraishi

Hitoshi Wakizako

Hiroki Sanemasa

Kazunori Hino

Yukito Sagasaki

Ken-ichi Motonaga

Shinichi Ishikawa

Moriyuki Nakashima

Kyoji Yano

Yoshinaga Maruyama

Hitoshi Wakisako

A carrier robot system and a control method for a carrier robot enabling teaching even when an operator cannot approach a teaching position for wafer conveyance are provided. In a carrier robot system comprising a robot which has a placement portion for placing an object presenting a low-profile form thereon and carries the object and a robot controller for controlling the robot, a jig mounted on the placement portion of the robot and having an image pickup member, an image processing portion for processing an image picked up by the image pickup member, and a superior control portion for controlling the robot controller and image processing portion from a superior position are provided.

Carrier robot system and control method for carrier robot

A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.

Transfer robot and inspection method for thin substrate

The present invention is a distance measuring device having a low power laser for use outdoors. The distance measuring device of the invention includes a laser emitting means that emits a pulsed laser beam to an object to be measured and an image reader that takes in irradiations images and stop period images of the object synchronously with an irradiation and stop period of the laser beam. A processing device then subtracts the stop image pixel values from the emission image pixel values to produce differential images. A minimum value image of the differential images is processed and binarized using a binary threshold to produce binary data from which a position where the laser beam is received is found. A calculation apparatus then determines a distance between the laser beam receiving position and the object based on the position where the laser beam is received.

Outdoor range finder

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Fukuoka, Japan

Kazunari Shiraishi