Shinko Electric Industries Co., Ltd.

Kazunao Yamamoto

Kenji Yanagisawa

Takanori Yamamoto

Hideki Yonekura

A substrate with optical waveguide includes an interconnect substrate and an optical waveguide formed on the interconnect substrate, wherein the optical waveguide includes a first cladding layer, a first protrusion formed on the first cladding layer, the first protrusion having an upper surface and an inclined surface connected to, and sloping relative to, the upper surface, a first metal film formed at least on the inclined surface, a core layer formed on the first cladding layer such as to cover part of the first metal film, and a second cladding layer formed on the first cladding layer such as to cover the core layer, wherein in plan view, a perimeter of a first surface region constituted by both the upper surface and the inclined surface does not have a corner where two lines meet, except for a part thereof where the inclined surface meets the first cladding layer.

Substrate with optical waveguide and optical communication device

An optical waveguide on a wiring substrate includes a first cladding layer, a first metallic film forming protrusion formed on the first cladding layer and including an inclined surface inclined with respect to an upper surface of the first cladding layer, a first metallic film formed on at least the inclined surface, a core layer formed on the first cladding layer so as to cover a portion of the first metallic film, a second cladding layer formed on the first cladding layer, so as to cover at least an upper surface and both side surfaces of the core layer, and a pair of first protrusions formed on the first cladding layer with the core layer interposed therebetween in a plan view and protruding from the first cladding layer, so as to be separated from the core layer and the first metallic film forming protrusion.

Protrusion dam-protected reflecting metal films in a substrate-supported optical waveguide, and optical communication device

An optical waveguide device includes: a wiring board; a first cladding layer that is formed on the wiring board; a plurality of second cladding layers that are formed on the first cladding layer; a plurality of protrusions each of which is formed on a corresponding one of the second cladding layers and each of which is provided with an inclined face inclined to a front face of the corresponding second cladding layer; a plurality of optical path converting mirrors each of which is formed on a corresponding one of the inclined faces of the protrusions; a plurality of core layers each of which is formed on a corresponding one of the second cladding layers and each of which directly contacts the corresponding optical path converting mirror; and a third cladding layer that is formed on the second cladding layers and the core layers.

Optical waveguide device, and optical communication apparatus

An optical waveguide device is provided. The optical waveguide device includes: a substrate; a first clad layer formed on the substrate; a core layer formed on the first clad layer; and a second clad layer formed on the first clad layer so as to cover the core layer. The second clad layer includes an uncured photosensitive resin covering a first portion of the core layer, and a cured photosensitive resin covering a second portion of the core layer.

Optical waveguide device

An optical waveguide device includes a wiring substrate, a first cladding layer formed on the wiring substrate, a base protective layer formed on the first cladding layer and formed into a certain pattern, a core layer formed on the first cladding layer and the base protective layer, a recess portion having an inclined surface and formed from the core layer to the base protective layer, an optical path conversion mirror formed on the inclined surface, and a second cladding layer formed on the first cladding layer and the core layer. A refractive index of the base protective layer is smaller than a refractive index of the core layer. A width of the base protective layer is equal to or greater than a width of the core layer.

An optical waveguide device includes a wiring board; an optical waveguide having a first cladding layer, a core layer and a second cladding layer formed in this order on the wiring board; an optical path conversion mirror formed in the core layer; and an optical element mounted on the second cladding layer, the optical element comprising a light emitting portion or a light receiving portion protruding from a lower side thereof. The second cladding layer has an opening formed above the optical path conversion mirror. The optical element is mounted on the second cladding layer so that at least one end thereof is positioned above the opening of the second cladding layer. The light emitting portion or light receiving portion of the optical element is arranged the opening of the second cladding layer.

Optical waveguide device and method of manufacturing the same

An optical waveguide device includes a wiring substrate, a connection pad formed in the wiring substrate, an optical waveguide in which a first cladding layer, a core layer, and a second cladding layer are formed of the wiring substrate in this order, an opening portion formed in the second cladding layer in a region including the connection pad, a contact hole formed at least in the first cladding layer on the connection pad, and being communicated with the opening portion of the second cladding layer, an optical element, including a connection terminal, connected to the connection pad through the contact hole, and underfill resin filled in the opening portion of the second cladding layer and the contact hole, and sealing a lower side of the optical element, wherein a part of the opening portion or the second cladding layer is exposed from the optical element.

An optical waveguide device includes a wiring substrate including an insulating layer and a wiring layer formed on the insulating layer, an optical waveguide formed on the insulating layer and the wiring layer, a groove portion formed on an edge side of the optical waveguide, the groove portion including an inclined face, a light path conversion mirror formed on the inclined face, and an opening portion formed in the wiring layer under the optical waveguide, wherein the wiring layer is not formed under the groove portion.

There is provided a photoelectric composite substrate including: a wiring substrate comprising a first region and a second region; an optical waveguide disposed on the first region of the wiring substrate and including: a first cladding layer on the wiring substrate; a core layer on the first cladding layer; a second cladding layer on the core layer; a wiring layer on the second region of the wiring substrate; and an insulating layer having an opening portion on the wiring layer such that the wiring layer is exposed through the opening portion, wherein the insulating layer is made of the same material as that of the core layer.

Photoelectric composite substrate and method of manufacturing the same

A method of manufacturing an optical waveguide, includes forming a first light path core layer having a first light path length on a first cladding layer, forming a groove portion having an inclined surface in an end side of the first light path core layer, forming a second light path core layer having a second light path length which is longer than the first light path length, in a lateral area of the first light path core layer, forming a groove portion having an inclined surface, arranged to an outer side than the groove portion of the first light path core layer, in an end side of the second light path core layer, forming partially a metal layer on the respective inclined surfaces of the first and second light path core layer, and forming a second cladding layer covering the first and second light path core layer.

Optical waveguide and method of manufacturing the same, and optical waveguide device

An optical waveguide includes a first cladding layer, at least two core portions formed on the first cladding layer and extended in a first direction, at least two groove portions formed in each of the core portions at positions spaced apart from each other in the first direction, each groove portion having an inclined surface, an optical path conversion mirror formed on one of the inclined surfaces formed in each of the core portions, and a second cladding layer formed on the first cladding layer and the core portions. The optical path conversion mirrors formed in the core portions adjacent to each other are arranged at positions different from each other in the first direction. The groove portions formed in the core portions adjacent to each other are arranged at the same positions in the first direction.

Optical waveguide and optical module

An optical wave guide includes an optical waveguide layer in which a core layer is surrounded by a cladding layer, a light path converting portion provided to a light entering side and a light emitting side of the optical waveguide layer respectively, a light entering portion demarcated in an outer surface of the cladding layer, in which a light is entered to the light path converting portion of the light entering side; and a light emitting portion demarcated in an outer surface of the cladding layer, in which a light from the light path converting portion of the light emitting side is emitted, wherein an outer surface of the cladding layer except the light entering portion and the light emitting portion is formed as a roughened surface.

An optical waveguide device includes a wiring substrate, an optical waveguide bonded on the wiring substrate and having a light path conversion inclined surface on both ends, and a light path conversion mirror formed to contact the light path conversion inclined surface of the optical waveguide and formed of a light reflective resin layer or a metal paste layer. In case the light reflective resin layer is used as the light path conversion mirror, the light reflective resin layer may be formed partially only on the side of the light path conversion inclined surface, or may be formed on the whole of the wiring substrate to coat the optical waveguide.

A method of manufacturing an optical waveguide, includes preparing a light path conversion component including a structure in which a protruding portion having a light path conversion inclined surface is covered with a metal layer and the metal layer serves as a light path conversion mirror, and a structural body in which a core layer is formed on a first cladding layer and an opening portion is provided in an end side of a light path of the core layer, arranging the light path conversion mirror of the light path conversion component in the opening portion of the core layer, and forming a second cladding layer covering the core layer, wherein a light path of a light that propagates through the core layer is converted toward a first cladding layer side by the light path conversion mirror.

A two-layer optical waveguide includes a core layer having a first surface and a second surface opposite to the first surface, and a cladding layer laminated on the first surface of the core layer. The two-layer optical waveguide further includes a mirror structure provided at a plurality of positions on the first surface of the core layer, the mirror structure directing a light signal which travels in the core layer, toward the second surface of the core layer. Each mirror structure includes an inclined plane formed on the first surface of the core layer, and a metal film formed on the inclined plane.

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Nagano, Japan

Kazunao Yamamoto