Ferrotec Material Technologies Corporation

Kazumasa Mori

Shunichi Eto

Wataru Yamagishi

A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrOand/or SiN: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10to 5.0×10/° C., is excellent in low electrostatic properties (10to 10Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.

Ceramic, probe guiding member, probe card, and socket for package inspection

A ceramic contains, in mass percent: SiN: 20.0 to 60.0%, ZrO: 25.0 to 70.0%, and one or more oxides selected from MgO, YO, CeO, CaO, HfO, TiO, AlO, SiO, MoO, CrO, CoO, ZnO, GaO, TaO, NiO, and VO: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.

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Tokyo, Japan

Kazumasa Mori