Hamamatsu-photonics K.k.

Mitsubishi Heavy Industries Limited

Japan Aerospace Exploration Agency

Kazumasa Kosugi

Kazuhisa Yamamura

Yoshikatsu Kuroda

Hiroo Yamamoto

Daisuke Matsuura

Shin Watanabe

Tadayuki Takahashi

Kei Gemba

Shin'ichiro Takeda

Shintaro Kamada

A through-slit is provided in a semiconductor wafer. A first virtual cutting line defines a chip portion including an energy ray sensitive region as viewed from a direction perpendicular to a first main surface. The shortest distance from a second virtual cutting line to the edge of a second semiconductor region is smaller than the shortest distance from the first virtual cutting line to the edge of the second semiconductor region. The through-slit penetrates through the semiconductor wafer in the thickness direction along the second virtual cutting line. A side surface to which a first semiconductor region is exposed is formed in the chip portion by providing the through-slit. A fourth semiconductor region of a first conductivity type is provided on the side surface side of the chip portion by adding impurities to the side surface to which the first semiconductor region is exposed.

Semiconductor wafer manufacturing method, method of manufacturing semiconductor energy beam detecting element, and semiconductor wafer

A radiation measuring apparatus () includes a scatterer detector (A), an absorber detector (B) and a processing unit (). Pixel electrodes () of the scatterer detector (A) and the absorber detector (B) are arranged such that a distance between centers of two neighbor pixel electrodes () is smaller than a mean free path of a recoil electron generated in the Compton scattering of an electromagnetic radiation. The processing unit () specifies and incidence direction of the electromagnetic radiation based on a recoiling direction to which the recoil electron recoils. In this way, an electron tracking-type Compton camera is realized which confines the incidence direction of the electromagnetic radiation by using the recoiling direction of the recoil electron in a Compton camera using a semiconductor detector.

Radiation measuring apparatus and radiation measuring method

Growing community of inventors

Shizuoka, Japan

Kazumasa Kosugi