L'air Liquide,societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude

Kazuma Suzuki

Kazutaka Yanagita

Toshiyuki Nakagawa

Shingo Okubo

Kohei Tarutani

Takashi Kameoka

Terumasa Koura

Ikuo Suzuki

Kouki Morimoto

Yuki Kumamoto

Mikio Goto

Koji Ishida

Koji Matsumoto

Supply system include a first vessel containing the precursor, a second vessel, a first gas conduit fluidically connecting the first vessel to the second vessel, wherein a pressure reduction device and a flow control device are fluidically mounted therein, a second gas conduit fluidically connecting the second vessel to a point of use, and a pressure gauge downstream the pressure reduction device for measuring a partial pressure of the precursor in the second vessel, wherein the partial pressure of the precursor in the second vessel is at a pressure lower than the saturated vapor pressure of the precursor at the temperature of the second vessel and higher than an inlet pressure requirement of the flow control device at the point of use. Methods for using the supply system are also disclosed.

Supply system for low volatility precursors

The present invention provides a supply system enabling a precursor of a solid material or a precursor of a liquid material to be supplied to a latter process at no higher concentration than required and also at or above a predetermined concentration. A supply systemcomprises: a vesselfor receiving a precursor material; a vessel heating unit for heating the vessel at a set temperature; a carrier gas heating unit which is disposed in an introduction line Land heats a carrier gas; a main measurement unit which is disposed in an outward conduction line Land obtains data relating to a gas of the precursor; and a carrier gas temperature control unit for controlling the temperature of the carrier gas heating unit in accordance with a measurement result of the main measurement unit.

Precursor supply system and precursors supply method

Growing community of inventors

Tsukuba, Japan

Kazuma Suzuki