Tokyo Electron Limited

Shimadzu Corporation

Kazuma Kubota

Tsuyoshi Moriya

Eiichi Sugawara

Yukiteru Sekita

A turbomolecular pump includes: a rotor () formed with rotating blades () in a plurality of stages, and rotating at high speed; a plurality of fixed blades () arranged along axial direction of the pump so as to alternate with respect to the rotating blades (); a pump housing () containing the rotating blades () and the fixed blades (), and formed with an inlet opening (); a circular disk (), provided close to the inlet opening of the rotor (), and arranged so as to oppose a surface of the rotor () radially inward than a root portion of the rotating blades; and a cylindrical mesh structure (), disposed between the inlet opening () and the rotor (), and made by interlacing fine wires. Particles that strike the rotor and bounce off are captured internally in the mesh structure ().

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Kyoto, Japan

Kazuma Kubota