Jeol Ltd.

Mitsubishi Jidosha Kogyo Kabushiki Kaisha

Taiyo Yuden Co., Ltd.

Kazuki Yagi

Toshihiko Oka

Nobuhiro Kawakami

Hayato Sugimura

Bryan Walter Reed

Takeo Sasaki

Ruth Shewmon Bloom

Tohru Watanabe

Kazutaka Suzuki

Masahiko Kubo

Shuichi Yuasa

Yusuke Toriumi

Masashi Shimizu

Yu Jimbo

Yoshiaki Kamiyama

Yoshiki Oyama

Kanako Noguchi

Hiroki Hashiguchi

Ichiro Onishi

Naoto Narita

A charged particle beam apparatus for scanning a specimen with a charged particle beam and acquiring a scan image. The charged particle beam apparatus including: an optical system that includes a pulse mechanism for illuminating the specimen with pulses of the charged particle beam, and a deflector that deflects the charged particle beam and scans the specimen with the deflected charged particle beam; and a control unit that controls the optical system. The control unit controls the optical system so as to satisfy T=n×t (n is a natural number). T represents a dwell time of the charged particle beam in each pixel of the scan image, and t represents a cycle of pulses of the charged particle beam.

Charged particle beam apparatus and control method for charged particle beam apparatus

A charged particle beam device scans a specimen with a charged particle beam and generates an image based on a detected signal from a detector that detects a signal generated from the specimen based on the scan performed by the charged particle beam. The charged particle beam device includes: a blanker that performs blanking of the charged particle beam; an image acquisition unit that acquires a plurality of images by controlling the blanking during the scan performed by the charged particle beam, the plurality of images including pixels corresponding to a region of the specimen that is irradiated with the charged particle beam and pixels corresponding to a region of the specimen that is not irradiated with the charged particle beam; and an integrated image generation unit that generates an integrated image by integrating the plurality of acquired images.

Charged particle beam device and image generation method

A charged particle beam apparatus includes a tilt mechanism that tilts a specimen, a detector that detects an electromagnetic wave emitted from the specimen, a table storage unit that stores a table in which tilt angle information on a tilt angle of the specimen and detection solid-angle information on the detection solid angle of the detector are associated with each other, a tilt control unit that controls the tilt mechanism, and a detection-solid-angle information acquisition unit that acquires the tilt angle information from the tilt control unit and acquires the detection solid-angle information with reference to the table.

Charged particle beam apparatus

A transmission electron microscope includes a control unit that: determines an excitation amount of a second illumination system lens based on an excitation amount of first illumination system lens such that the second illumination system lens satisfies a first optical condition; and determines a control amount of a first deflector and a control amount of a second deflector based on the excitation amount of the second illumination system lens such that the first deflector and the second deflector satisfy a second optical condition. The first optical condition is for a convergence angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed, and the second optical condition is for an illuminating position of the electron beam and an illuminating angle of the electron beam to be constant even if the excitation amount of the first illumination system lens has changed.

Transmission electron microscope and method of adjusting optical system

A charged particle beam device including: a charged particle beam source which emits a charged particle beam; a blanking device which has an electrostatic deflector that deflects and blocks the charged particle beam; an irradiation optical system which irradiates a specimen with the charged particle beam; and a control unit which controls the electrostatic deflector, the control unit performing processing of: acquiring a target value of a dose of the charged particle beam for the specimen; setting a ratio A/B of a time A during which the charged particle beam is not blocked to a unit time B (where A&#x2260;B, A&#x2260;0), based on the target value; and operating the electrostatic deflector based on the ratio.

Charged particle beam device

A sample holder capable of limiting X-rays accepted into an X-ray detector is provided. The sample holder is for use in an electron microscope equipped with a polepiece assembly and a semiconductor detector. The sample holder includes: a sample stage on which a sample is held; and a shield plate. When the sample stage has been introduced in the sample chamber of the electron microscope, the shield plate is located between the polepiece assembly and the semiconductor detector.

Sample holder and electron microscope

In a cylinder head () having a built-in exhaust manifold () of an engine (), outer coolant passages (A andB) in which an engine coolant circulates are provided, and are disposed along the manifold positioned at a side of an outer surface (C) of the cylinder head (). Further, inner coolant passages (A andB) having shapes which are branched from the outer coolant passages (A andB) and then join are provided, and are disposed along the outer coolant passages (A andB) and at an inner side of the cylinder head ().

Cylinder head of engine

An engine includes a side wall, a head cover, and a cam cover. The cam cover is disposed obliquely relative to the side wall. The cam cover has a seal line that seals up a gap between the head cover and the cam cover. The engine further includes a cam cap fixed to an upper surface of the side wall to support a camshaft so as to be rotatable between the side wall and itself.

Engine

An engine includes: an oil control valve built in a cylinder head, and configured to control a pressure of oil to be supplied to a variable valve mechanism via a camshaft; and a cam cap fixed to an upper face of the cylinder head, and configured to rotatably support the camshaft between the cam cap and the cylinder head, as a flow passage for the oil to be force-fed from an oil pump to the oil control valve, the cam cap including: a lateral passage formed inside the cam cap, and extended in a direction along the upper face of the cylinder head; and a downward passage extended downward from the lateral passage so as to serve as a downstream side flow passage of the lateral passage, and configured to guide the oil toward the oil control valve.

In a hybrid module which is mounted on a mother circuit board with a first surface of a substrate opposed to the mother circuit board, a cavity is formed on the first surface, and a heat-generating circuit component is facedown-bonded in the cavity. Heat generated in the circuit component is radiated to the mother circuit board through a heat radiation plate.

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Tokyo, Japan

Kazuki Yagi