Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,341 patents)
1 patent:
1. 11577269 - Workpiece processing apparatus using workpiece having reference marks, workpiece processing method, and computer storage medium