Disco Corporation

Neturen Co., Ltd.

Kazuki Mori

Takashi Ikeda

Fumiaki Ikuta

Yoshitaka Kuwahara

Kazuya Hirata

Ryohei Yamamoto

Mitsuhiro Okamoto

Irradiation conditions for a laser beam to respective ones of a plurality of regions included in the upper surface of an ingot are set according to the numbers of photons of fluorescence occurring when excitation light is irradiated to the respective regions. Here, it is to be understood that the number of the photons of the fluorescence occurring from a region of an ingot depends on the concentration of an impurity doped in the ingot. A separation layer can therefore be formed at a uniform depth from the upper surface of the ingot even if regions of different impurity concentrations are included in the ingot. It is hence possible to reduce a kerf loss when wafers are sliced from an ingot.

Laser processing apparatus and laser processing method

A detecting apparatus for use in specifying regions having different impurity concentrations in an ingot includes an ingot holding unit having a holding surface for holding the ingot thereon, an excitation light source for applying excitation light having a predetermined wavelength to a face side of the ingot held on the holding surface, and a photodetector for detecting fluorescence emitted from the ingot upon exposure to the excitation light and generating an electric signal representing a number of photons of only light whose wavelength is in an infrared radiation range, of the detected fluorescence.

Detecting apparatus

A method for setting conditions for a shaft diameter enlargement, a shaft diameter enlargement method, and a shaft diameter enlargement apparatus are provided. A controller of the shaft diameter enlargement apparatus controls a compressing section, a bending section, and a rotating section to enlarge an intermediate portion of a shaft workpiece to have a predetermined outer diameter by rotating the shaft workpiece about its axis with axial compressive force a bending angle being applied to the intermediate portion. The controller determines whether the shaft workpiece is acceptable, based on the number of rotations of die shaft workpiece required for enlarging the intermediate portion to have the predetermined outer diameter or based on an enlargement ratio of the intermediate portion.

Shaft diameter enlargement condition setting method, shaft diameter enlargement method and shaft diameter enlargement apparatus

A method and an apparatus for manufacturing a stepped member are provided. An intermediate portion of a shaft workpiece is radially enlarged while being compressed in an axial direction by applying alternating load to the intermediate portion in a direction intersecting the axial direction in a state in which pressure that compresses the shaft workpiece in the axial direction is applied to both ends of the shaft workpiece. The enlarged intermediate portion of the shaft workpiece is cat in a direction perpendicular to the axial direction so that the shaft workpiece is divided into two stepped members. Each of the stepped members has a shaft portion and a head portion provided at an axial end of the shaft portion, and the head portion has a larger diameter than the shaft portion.

Growing community of inventors

Tokyo, Japan

Kazuki Mori