Tdk Corporation

Hitachi High-tech Corporation

Hitachi-high-technologies Corporation

Tdk-lambda Corporation

Kazuki Ishizawa

Michio Hatano

Hiroyuki Chiba

Masayoshi Ono

Yoshihiro Takahoko

Shuhei Yabu

Kenichi Nishinaka

Anoru Suga

Michiko Suzuki

Daichi Nara

Jyunya Hiura

Ken Takayama

Keita Fukudome

A charged particle microscope includes an electron gun provided inside a barrel and a stage. In the stage, a sample holderholding a sample SAM can be installed. The stageincludes an annular rough movement stage memberand an annular fine movement stage member. An X rough movement actuatorand a Y rough movement actuatorare connected to the rough movement stage member. An X fine movement actuatorand a Y fine movement actuatorare connected to the fine movement stage member. Here, a first movable range in which the X rough movement actuatorand the Y rough movement actuatorare able to move the rough movement stage memberis broader than a second movable range in which the X fine movement actuatorand the Y fine movement actuatorare able to move the fine movement stage member. Accordingly, it is possible to improve performance of the charged particle microscope.

Charged particle microscope and stage

A transformer includes a primary winding and a secondary winding, which are flat, and a magnetic core that has a middle leg that passes through the primary and secondary windings, a first core that is connected to one end along the length direction of the middle leg, and a second core that is connected to the other end along the length direction. A first wall surface on the side of the first core where the middle leg is positioned and a second wall surface on the side of the second core which faces the first wall surface are formed so as to be parallel, the primary winding is fixed to the first wall surface, the secondary winding is fixed to the second wall surface, and the distance between the primary winding and the secondary winding is kept constant.

Transformer, power supply, and medical system

An objective of the present invention is to provide a charged particle beam device capable of estimating a lifetime of a filament of a charged particle beam source with a cheap and simple circuit configuration. The charged particle beam device according to the present invention includes a boosting circuit that boosts a voltage to be supplied to a filament and estimates a remaining duration of the filament using a measured value of a current flowing on a low-voltage side of the boosting circuit (see FIG.).

Charged particle beam device

Reverse currents are prevented using existing components, like a primary-side current transformer. A power supply includes an isolation transformer, a switch, a synchronous rectifier, a smoother, a controller with a signal generator circuit that outputs main drive signals for main switching elements of the switch and drive signals for synchronous rectifier elements of the synchronous rectifier, and a current detector that has a current transformer, detects a current flowing to the switch, and outputs an output current detection signal. The controller includes an OR circuit that generates an OR signal for the main drive signals and a reverse current determination circuit that determines whether a reverse current has occurred based on the OR signal and the output current detection signal. When the occurrence of a reverse current has been determined, outputting of the main drive signals and the drive signals is stopped.

Power supply and medical system

The present invention shortens the time spent in a search for a visual field by a user in a charged particle beam apparatus in which an observation range on a sample is set by using a captured image of the sample. When the contour of a sample table is circularly configured, for example, the central position of a sample table image on an optical image is quickly, easily, and accurately obtained by calculating, from the coordinates of the respective vertices of a triangle circumscribed about the contour created on the optical image by the user, the incenter of the triangle without direct recognition by automatic image analysis, which is complex and time-consuming, of the contour of the sample table image on the optical image.

Charged particle beam apparatus, alignment method of charged particle beam apparatus, alignment program, and storage medium

An edgewise coil achieves positioning of both end portions and accurate and reliable conduction with respect to a circuit board in a simple configuration, and can be downsized. The edgewise coil is usable in a conductor. The edgewise coil includes a base material and a coil member fixed at both end portions to the base material and including an external wound-wire portion placed on the base material and an internal wound-wire portion extending in the base material.

Growing community of inventors

Tokyo, Japan

Kazuki Ishizawa