Tokyo Electron Limited

Kazuhito Ogino

Toshihiko Iijima

Kaori Arai

Disclosed is a pre-alignment method and a computer-readable medium storing a pre-alignment program capable of reducing pre-alignment time and transfer time of a semiconductor wafer. The pre-alignment method includes steps of rotating the semiconductor wafer transferred from a receiving unit onto a rotating body of a pre-alignment mechanism by a transfer mechanism, calculating and storing an eccentric value between a shaft center of the rotating body and a center of the semiconductor wafer detected by a sensor of the pre-alignment mechanism, correcting a positional deviation of the semiconductor wafer on the rotating body by the transfer mechanism according to the calculated eccentric value, when the calculated eccentric value exceeds a predetermined value, and estimating the eccentric value when conducting the pre-alignment operation for a succeeding semiconductor wafer, based on the eccentric value accumulated during the pre-alignment operation conducted for semiconductor wafers prior to the succeeding semiconductor wafer.

Growing community of inventors

Nirasaki, Japan

Kazuhito Ogino