Shin-etsu Chemical Co., Ltd.

Kazuhiro Yamaguchi

Noboru Kimura

Takuma Kushihashi

Nobuo Kawada

Akira Satoh

There is disclosed a pyrolytic boron nitride container for accommodating a material serving as a source of molecular beams for molecular beam epitaxy, wherein the transmissivity of the pyrolytic boron nitride container with respect to light having a wave number of 2600 cm,to 6500 cm,has a profile such that the transmissivity changes in the height direction of the container. The pyrolytic boron nitride container can be manufactured through a simple process and at low cost. The pyrolytic boron nitride container can prevent material melt from rising along the inner wall surface and prevent splashed material melt from adhering to the upper portion of the container. Further, the pyrolytic boron nitride container can stabilize molecular beam epitaxial growth and improve the quality of epitaxial film.

Pyrolytic boron nitride container and manufacture thereof

A pyrolytic boron nitride crucible is disclosed which is suitable for producing a single crystal of a semiconductor compound of Group III and V by the LEC method. The crucible comprises a side part and a bottom part. The bottom part has an absorption coefficient of light of wavelengths between 3,700 cm.sup.-1 and 6,500 cm.sup.-1 of at most 1.7 and/or the absorption coefficient of light of wavelengths between 3,700 cm.sup.-1 to 6,500 cm.sup.-1 of the bottom part is less than that of the side part by at least 0.5. In the crucible, the heat conduction from the bottom part to material melt in the crucible is strengthened, so that the convection flow of the material melt is suppressed and the temperature distribution in the crucible can be easily controlled.

Pyrolytic boron nitride crucible

A novel ceramic electrostatic chuck with built-in heater is proposed which is outstandingly durable in use with repeated cycles of heating and cooling because of the absence of troubles due to exfoliation of layers and crack formation in the ceramic body. Differently from conventional ceramic electrostatic chuck with built-in heater consisting of a base plate of sintered body of boron nitride, layers of pyrolytic graphite formed on the surfaces of the base plate to serve, one, as the electrode layer and, the other, as the heater element, and an insulating layer of pyrolytic boron nitride formed on the pyrolytic graphite layers, the base plate in the invention is made of a composite sintered body of a powder mixture of aluminum and boron nitrides in a specified mixing proportion so as to minimize the difference in the thermal expansion coefficient from those of the overlaying layers.

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Kanra, Japan

Kazuhiro Yamaguchi