Sakura Color Products Corporation

Kazuhiro Uneyama

Keita Hishikawa

Seisaku Oshiro

Masayuki Nishi

Yu Yamakawa

Masahiro Shimizu

Provided is an indicator that can easily detect whether treatment with at least one member of plasma, ozone, ultraviolet rays, and radical-containing gas is uniformly performed on an entire substrate in an electronic device manufacturing apparatus; also provided is a method for designing and/or managing an electronic device manufacturing apparatus using the indicator. The indicator is used in an electronic device manufacturing apparatus, wherein (1) the indicator detects at least one member selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas, (2) the indicator has a shape that is the same as that of a substrate used in the electronic device manufacturing apparatus, (3) the indicator contains a color-changing layer, and (4) the color-changing layer is formed by an ink composition whose color changes or disappears by reaction with at least one member selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas.

Indicator used in electronic device manufacturing apparatus and method for designing and/or managing the apparatus

The present invention provides an ink composition for forming a color-changing layer that changes color by plasma treatment, the ink composition exhibiting excellent heat resistance, with the gasification of the color-changing layer or the scattering of the fine debris of the color-changing layer caused by plasma treatment being suppressed to the extent that electronic device properties are not affected. The invention provides an ink composition for forming a color-changing layer that changes color by plasma treatment, the ink composition comprising metal oxide particles containing at least one element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi, and a binder resin.

Ink composition for plasma processing detection, and indicator for plasma processing detection using said ink composition

The present invention provides a plasma treatment detection indicator including a color-changing layer that changes color by plasma treatment, exhibiting excellent heat resistance, with the gasification of the color-changing layer or the scattering of the fine debris of the color-changing layer caused by the plasma treatment being suppressed to such a degree as to not affect the electronic device properties. Specifically, the present invention provides a plasma treatment detection indicator including a color-changing layer that changes color by plasma treatment, the color-changing layer containing at least one metal element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi in the form of a simple substance and/or an inorganic compound containing at least one metal element selected from the group consisting of Mo, W, Sn, V, Ce, Te, and Bi.

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Osaka, Japan

Kazuhiro Uneyama