Nikon Corporation

Canon Kabushiki Kaisha

Tokyo Ohka Kogyo Co., Ltd.

Kazuhiro Takahashi

Yukihisa Wada

Masahiro Suzuki

Shinya Koga

Akiyoshi Suzuki

Yutaka Tsuda

Riichi Higaki

Daijiro Mori

Daiki Ito

Natsumi Okawa

Hiromi Tomii

A chemical solution used for cleaning or etching a ruthenium-containing layer, which can obtain the ruthenium-containing layer having a reduced surface roughness while maintaining a good etching rate against the ruthenium, and a method for fabricating ruthenium wiring. The chemical solution includes orthoperiodic acid, a base component, and any one of a nitrogen-containing heterocyclic compound, an organic phosphonic acid, and an organic carboxylic acid.

Chemical solution used for cleaning or etching ruthenium-containing layer and method for fabricating ruthenium wiring

A method for producing a semiconductor element and a chemical solution to be used in the method for producing a semiconductor element, the method including dry-etching or chemically-mechanically polishing a ruthenium-containing layer located as an uppermost layer of a substrate; and bringing a surface of the substrate into contact with a chemical solution thereby satisfactorily cleaning and removing a ruthenium residue formed on the surface of the substrate; and a chemical solution to be suitably used in the method for producing a semiconductor element.

Method for producing semiconductor element and chemical solution to be used in method for producing semiconductor element

A method for manufacturing a ruthenium wiring including (i) treating a metal surface including ruthenium using a first chemical solution including a compound having a functional group capable of coordinating to a ruthenium atom, and (ii) carrying out an etching treatment on the metal surface including ruthenium treated with the first chemical solution, using a second chemical solution.

Method for manufacturing ruthenium wiring

An electronic camera comprises an image processing unit that performs image processing using a plurality of adjustment parameters and a parameter setting unit that sets each of the plurality of parameters for the image processing unit according to a single change command.

Electronic camera

An image processing device includes an interpolation color processing circuit receiving images of continuous frames to perform interpolation and color processing thereon, a storage part cyclically storing a plurality of frames of images being processed and having been processed by the interpolation color processing circuit, a plurality of image compression processing circuits reading the images of frames processed by the interpolation color processing circuit to perform image compression processing on the images and being cyclically started up for each of frames to perform parallel processing, and a compression data storage part storing compression data processed by the image compression processing circuit. The image processing device can solve a problem of a prior art in that long processing time is required because image compression processing is heavier than interpolation processing and color processing.

Image processing device and electronic camera

A noise reducing device captures image data obtained by capturing a field with an image capturing part and a plurality of blackout image data obtained by capturing the field with the image capturing part under a light shielded state. This device reduces non-correlative random noise in the plural blackout image data. With random noise reduced, fixed pattern noise appears more accurately in resultant as blackout image data B. This device reduces the fixed pattern noise in the image data by using this blackout image data B.

Noise reducing device, electronic camera, and image processing program for reducing image noise by using blackout image

An imaging device has an image pickup section, a compression processing section, a correlation data holding section, and first and second calculating sections. The image pickup section generates photographic image data. The compression processing section performs compression processing on photographic image data. The correlation data holding section holds plural correlation data on changes in scale factor and compressed data amount of sample image data. The first calculating section calculates initial scale factors from standard correlation data generated from image data including high-frequency components most among sample image data and target compressed data amount. The second calculating section determines whether recompression processing by use of a different scale factor is necessary from a difference between target compressed data amount and compressed photographic image data amount and calculates the scale factor based on compressed photographic image data and correlation data at recompression processing such that the data compression rate decreases.

Imaging device that generates photographic image data

There is provided a digital still camera which is capable of performing fixed-length compression to image data at high speed while suppressing dispersion in size of compressed data by including; a first compression unit which compresses inputted image data using a predetermined first compression parameter, a second compression unit which compresses the inputted image data using a second compression parameter different from the first compression parameter, an evaluating unit which evaluates compression results of the first compression unit and of the second compression unit based on a relationship with a predetermined range including a target size of compressed data, and a selecting unit which selectively performs recording processing to a compression result highly evaluated by the evaluating unit.

Digital still camera

A device for detecting the position of a light source of an illumination optical system. The position detecting system of the present invention is particularly suitable for use in the detection of any positional deviation, from a correct position, of a Hg lamp used in a semiconductor device manufacturing exposure apparatus. The device includes an optical system for forming a plane which is optically conjugate with the surface of an object to be illuminated and a member disposed in such a plane and having a pinhole. The light emitted from the light source and passed through the pinhole is received by a photodetector, whereby the positional deviation of the light source is accurately detected. In another aspect of the invention, the detected positional deviation of the light source is automatically adjusted.

Device for detecting position of a light source with source position

An illuminating optical device including: a light source for emitting a light beam; and an illuminating optical system for receiving the light beam from the light source to irradiate an object with the light beam, the illuminating optical system having an optical axis and an illuminance-distribution changing lens system which is movable in the direction of the optical axis to change an illuminace-distribution forming characteristic of the illuminating optical system.

Illuminating optical device

An illumination optical system including an optical system effective to direct light from a light source to a surface to be illuminated, and an optical unit disposed in a path of the light defined by the optical system, the optical unit having a variable refracting power which is variable in accordance with the size of the surface to be illuminated.

Growing community of inventors

Kawasaki, Japan

Kazuhiro Takahashi