Mitsubishi Denki Kabushiki Kaisha

Kazuhiro Oka

Takeshi Morita

Seigo Hiramoto

Hiroyuki Ishii

Megumi Ohmine

Koichi Sakurai

Akira Shuhara

Yutaka Ohhashi

Katsuhiro Fujiyoshi

Ayumu Onoyama

Toshio Kagawa

Transforming optical images of a portion including a normal conductor pattern having a surface roughness, a portion subjected to an inspection, and a reference portion to images of electric charges and picking up these as electric signals by an image pick-up device, rendering the optical image including the normal conductor pattern having the surface roughness to a pixel signal by the image pick-up device, controlling a light volume of the optical image so that the pixel signal is saturated or immediately before the saturation, picking up a pixel signal of the portion to be inspected under this light volume, obtaining a differential signal from a pixel signal picked up from the reference portion, and judging an existence of defect from the differential signal, so as to detect defects such as a hiatus of conductor, a short circuit, and a deposition of an extraneous matter on a wafer, on which the normal conductor pattern having the roughened surface, with a high accuracy in processes of forming films and etching in manufacturing a semiconductor device.

Defect inspection method and defect inspection equipment

A distributor rotor electrode comprising an electrode head having a pair of flat surfaces substantially parallel to a plane of rotation of the rotor electrode and a generally arcuated, convexed discharge surface perpendicular to the plane of rotation to define a discharge gap on it. The electrode head has an electrically high-resistance layer attached to at least the pair of substantially flat surfaces, and comprises a material including a ceramic effective to suppress noise electromagnetic wave radiation at the discharge surface. The high-resistance layer material may comprise 10% to 70% of SiC and a mixture of SiOx, Si and C and may be attached to the discharge surface as well as to the flat surfaces, or to the flat surfaces only to expose the arcuated discharge surface to the discharge gap. The arcuated discharge surface may have ridges and grooves extending generally perpendicularly to the plane of rotation, and may have a wave-shaped or comb-shaped contour. The high-resistance layer may have a first ceramic layer of a first ceramic material exhibiting a good noise suppressing characteristic at the discharge surface and a second ceramic layer of a second ceramic material exhibiting a good adhesive characteristic at where it is attached to electrode head. The first ceramic material may comprise nitride ceramic or carbide ceramic such as silicon carbide and the second ceramic material may comprise oxide ceramic such as aluminum oxide.

Rotor electrode for a distributor

A thin film vacuum evaporation device having a reaction gas supplier for locally supplying a reaction gas to the evaporating point on a target. The device includes a reaction chamber that can be kept under vacuum with a light transmitting window disposed therein allowing the passage of a laser beam on the target. Also, a differential pressure chamber may be provided between the target and the light transmitting window, and a gas introducing section may be connected to the differential pressure chamber. Thus, the vapor generated by the target is prevented from adhering to the light transmitting window, and the light transmitting window can be kept clean.

Thin film vacuum evaporation device

A laser vapor deposition apparatus includes a vacuum chamber which includes an exhaust port and in which a material to be vaporized and a substrate are enclosed, a laser beam source for irradiating the material to be vaporized with a laser beam so as to deposit from the material a desired compound onto the substrate, and a gas supply source which supplies to the surface of the material, a gas that can prevent changes in property of the material which could be caused by the laser beam irradiation.

Laser vapor deposition apparatus

Growing community of inventors

Amagasaki, Japan

Kazuhiro Oka