Average Co-Inventor Count = 4.36
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,341 patents)
2 patents:
1. 11164730 - Plasma probe device and plasma processing apparatus
2. D678228 - Chamber block